QQ客服 官方微博 反馈留言

	Technology of double side exposure and bonding for fabrication of accelerometer
	Zhang, TP ; Li, T ; Deng, K
	1998
英文摘要	Accuracy of MEMS need to be very high. Accelerometer and gyroscope have been partly fabricated with 1 mu m(double side) processing using Suss Ma6/Ba6. Bonding with 2.5 mu m is difficult, but we realized it. Accelerometer has some good characteristics, such as linear and signal enough strong.; Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Materials Science, Characterization & Testing; Materials Science, Coatings & Films; Optics; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294016]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, TP,Li, T,Deng, K. Technology of double side exposure and bonding for fabrication of accelerometer. 1998-01-01.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。