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	Fabrication of Ultra-thin Silicon PIN Detector
	Yu, Min ; Dong, Xianshan ; Li, Ying ; Tian, Dayu ; Wang, Jinyan ; Jin, Yufeng
	2011
关键词	ultra-thin PIN detector silicon TELESCOPE
英文摘要	Ultra-thin silicon PIN detectors are applied widely in nuclear physics experiments and space exploration. It is used in. E-E telescope system as the Delta E detector to detect the energy loss of high energy particles so that to identify the charge and mass of the particle. The Delta E detector is required to be very thin(<50 mu m) in order to let low energy particles to go through the Delta E detector and enter the followed E detector. The fabrication of ultra-thin silicon detector is very difficult and challenging due to the fragility of the ultra-thin silicon membrane considering that the area of the detector is required to as large as 10 similar to 100 mm(2). Several different technologies have been proposed to fabricate the ultra-thin silicon PIN detector, such as back side locally thinning of the high resistivity silicon wafer, application of the SOI technology or wafer thinning and bonding technology. The monolithic Delta E-E detector telescope technology has also been proposed. In this talk we review the development of ultra-thin silicon PIN detector technology including our research work.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000297572400003&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Instruments & Instrumentation; Optics; Imaging Science & Photographic Technology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1117/12.900555
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293162]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Min,Dong, Xianshan,Li, Ying,et al. Fabrication of Ultra-thin Silicon PIN Detector. 2011-01-01.

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