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	FABRICATION OF ELECTROPLATED NICKEL MULTIELECTRODE MICROPROBES WITH FLEXIBLE PARYLENE CABLE
	Yu, Huaiqiang ; Wang, Shuo ; Wang, Wei ; Li, Zhihong
	2012
关键词	ARRAY
英文摘要	We have designed, fabricated and characterized nickel-based multielectrode microprobes with flexible parylene cable employing low-cost nickel electroplating and parylene etching techniques, used for chronic recording of neural signals. Electroplated nickel microprobes, which are encapsulated with parylene for biocompatibility, are more mechanically robust than silicon-based ones. The parylene cable facilitates the connection with external circuit and reduces the packaging requirements. Moreover, the bump-shaped electrodes allow a better contact with neural tissues and consequently improve the signal to noise ratio of recording signals. The impedance magnitude of 25 mu mx25 mu m electrodes at 1kHz is similar to 1.0M Omega. In-vitro penetration of the fabricated microprobes into the muscle tissue has been successfully demonstrated.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000312912800061&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/MEMSYS.2012.6170135
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292839]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Huaiqiang,Wang, Shuo,Wang, Wei,et al. FABRICATION OF ELECTROPLATED NICKEL MULTIELECTRODE MICROPROBES WITH FLEXIBLE PARYLENE CABLE. 2012-01-01.

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