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	A novel micro Pirani gauge with mono-wire sensing unit for microsystem application
	Yunsong, Qiu ; Lei, Zhao ; Yufeng, Jin
	2009
英文摘要	This paper reports a novel, simple, low-cost and high sensitivity micro Pirani gauge to monitor long-time pressure change and stability inside a vacuum package. The packaging structure is very simple with one wire as sensing part only. Two ends of a metal wire with a certain temperature coefficient of resistance are bonded to the pads of the ceramic structure with a cavity for microsystem application. The metal wire and the packaged part can be formed as a micro Pirani gauge. The dynamic range of this novel Pirani gauge in our experiment is from 1Pa to 100Pa. ?2009 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/ICEPT.2009.5270710
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153620]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yunsong, Qiu,Lei, Zhao,Yufeng, Jin. A novel micro Pirani gauge with mono-wire sensing unit for microsystem application. 2009-01-01.

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