Preparation and characterization of p-type semiconducting tin oxide thin   film gas sensors

doi:10.1063/1.3354092

CORC > 北京大学 > 信息科学技术学院

	Preparation and characterization of p-type semiconducting tin oxide thin film gas sensors
	Liu, Xiaodi ; Zhang, Dacheng ; Zhang, Yang ; Dai, Xiaotao
刊名	应用物理杂志
	2010
关键词	atomic force microscopy calcination ellipsometry gas sensors nanosensors scanning electron microscopy semiconductor thin films sputter deposition tin compounds X-ray diffraction SENSITIVITY TEMPERATURE
DOI	10.1063/1.3354092
英文摘要	P-type conducting undoped tin oxide thin film gas sensor is fabricated by direct current reactive magnetron sputtering method and calcination technique. Physical characteristics of the undoped tin oxide thin films have been analyzed by Spectroscopic ellipsometer, x-ray diffraction (XRD), scanning electronic microscope, and atomic force microscopy. According to the ethanol sensitivity properties of the sensors, we find that the calcination temperature and the thickness of the films are correlated with the special p-type conducting type; the p-type ultrathin film (10 nm) gas sensor shows better gas sensitivity and less baseline shift. XRD studies indicate that the preferred unidentified diffraction peak at 33.082 degrees favors the formation of p-type conducting. When the intensities of unidentified diffraction peak increases, the gas sensing properties is largely promoted. The response time of the p-type sensor is less than 1 s to 1000 ppm ethanol.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000276210800089&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Physics, Applied; SCI(E); EI; 2; ARTICLE; 6; 107
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152728]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, Xiaodi,Zhang, Dacheng,Zhang, Yang,et al. Preparation and characterization of p-type semiconducting tin oxide thin film gas sensors[J]. 应用物理杂志,2010.
APA	Liu, Xiaodi,Zhang, Dacheng,Zhang, Yang,&Dai, Xiaotao.(2010).Preparation and characterization of p-type semiconducting tin oxide thin film gas sensors.应用物理杂志.
MLA	Liu, Xiaodi,et al."Preparation and characterization of p-type semiconducting tin oxide thin film gas sensors".应用物理杂志 (2010).