Microstructure and nanomechanical properties of co-deposited Ti-Cr films prepared by magnetron sputtering

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	Microstructure and nanomechanical properties of co-deposited Ti-Cr films prepared by magnetron sputtering
	Zhang, Fanyong; Li, Chao; Yan, Mufu; He, Jining; Yang, Yange; Yin, Fuxing; Zhang, FY (reprint author), Hebei Univ Technol, Res Inst Energy Equipment Mat, Tianjin 300130, Peoples R China.
刊名	ELSEVIER SCIENCE SA
	2017-09-25
卷号	325 页码:636-642
关键词	Ti-cr Film Magnetron Sputtering Microstructure Nanoindentation
ISSN号	0257-8972
英文摘要	Pure Ti and Ti-Cr films of various Cr content (<40 at.% Cr) were prepared on the surface of aluminum alloy by using DC magnetron sputtering. Ti-Cr alloy films exhibited a bcc structure (beta phase) stabilized with Cr addition. Pure Ti and Ti-Cr alloy films displayed (002) and (110) preferred orientations, respectively. The denser morphologies and finer grains were achieved for Ti-Cr films with increasing the Cr content. Compared with that of pure alpha-Ti film, Ti-Cr films (beta type) showed remarkable increase in hardness (similar to 6.0 GPa). The further increasing Cr content (>10 at.% Cr) slightly changed the hardness and elastic modulus of Ti-Cr films with beta structure. The analysis of HE ratio (H-3/E(2)and H/E) indicated the better plastic and wear resistance of Ti-Cr films than that of pure Ti films. (C) 2017 Elsevier B.V. All rights reserved.; Pure Ti and Ti-Cr films of various Cr content (<40 at.% Cr) were prepared on the surface of aluminum alloy by using DC magnetron sputtering. Ti-Cr alloy films exhibited a bcc structure (beta phase) stabilized with Cr addition. Pure Ti and Ti-Cr alloy films displayed (002) and (110) preferred orientations, respectively. The denser morphologies and finer grains were achieved for Ti-Cr films with increasing the Cr content. Compared with that of pure alpha-Ti film, Ti-Cr films (beta type) showed remarkable increase in hardness (similar to 6.0 GPa). The further increasing Cr content (>10 at.% Cr) slightly changed the hardness and elastic modulus of Ti-Cr films with beta structure. The analysis of HE ratio (H-3/E(2)and H/E) indicated the better plastic and wear resistance of Ti-Cr films than that of pure Ti films. (C) 2017 Elsevier B.V. All rights reserved.
学科主题	Materials Science, Coatings & Films ; Physics, Applied
语种	英语
资助机构	Natural Science Foundation of Tianjin [16JCQNJC03500]; Natural Science Foundation of Hebei Province [E2017202066]; National Natural Science Foundation of China [51371070, 51372067]
公开日期	2018-01-10
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/79086]
专题	金属研究所_中国科学院金属研究所
通讯作者	Zhang, FY (reprint author), Hebei Univ Technol, Res Inst Energy Equipment Mat, Tianjin 300130, Peoples R China.
推荐引用方式 GB/T 7714	Zhang, Fanyong,Li, Chao,Yan, Mufu,et al. Microstructure and nanomechanical properties of co-deposited Ti-Cr films prepared by magnetron sputtering[J]. ELSEVIER SCIENCE SA,2017,325:636-642.
APA	Zhang, Fanyong.,Li, Chao.,Yan, Mufu.,He, Jining.,Yang, Yange.,...&Zhang, FY .(2017).Microstructure and nanomechanical properties of co-deposited Ti-Cr films prepared by magnetron sputtering.ELSEVIER SCIENCE SA,325,636-642.
MLA	Zhang, Fanyong,et al."Microstructure and nanomechanical properties of co-deposited Ti-Cr films prepared by magnetron sputtering".ELSEVIER SCIENCE SA 325(2017):636-642.