高性能氮化铝差分谐振式加速度计的结构设计

doi:10.13695/j.cnki.12-1222/o3.2018.01.012

	高性能氮化铝差分谐振式加速度计的结构设计
	高杨; Lei, Qiang; Han, Chao; Gao, Yang
刊名	中国惯性技术学报
	2018
卷号	26 期号:1 页码:69-75
ISSN号	1005-6734
DOI	10.13695/j.cnki.12-1222/o3.2018.01.012
其他题名	Structure design of high-performance aluminum nitride differential resonant accelerometer
文献子类	Article
英文摘要	A high-performance aluminum nitride (AlN) differential resonator accelerometer is proposed. The inertia of the mass is amplified to improve the sensitivity by two-stage microlever, the cross sensitivity is reduced by I-shaped supporting beam, and the differential frequency detection scheme is used to decrease the effect of temperature common mode error. This accelerometer is mainly composed of proof mass, supporting beam, two-stage microlever and resonator, and its structural parameters are optimized by theoretical analysis and finite element simulation. The modal analysis shows that the fundamental frequencies of the two resonators are approximately 373.3 kHz, and their frequency differences from the interferential modes are about 9.4 kHz, which effectively achieves the mode isolation. According to the simulation results of sensitivity, the sensitivity, linearity and cross sensitivity of AlN differential resonator accelerometer are 64.6 Hz/g, 0.787% and 0.0033 Hz/g, respectively. The simulation results of thermal stress show that the temperature sensitivity of the single resonator is about 490 Hz/, and the temperature sensitivity of the output differential frequency is -0.83 Hz/, which demonstrate that the differential frequency detection scheme can effectively reduce the influence of temperature common mode error. The simulation results verify the feasibility of the accelerometer structure design. © 2018, Editorial Department of Journal of Chinese Inertial Technology. All right reserved.
语种	中文
CSCD记录号	CSCD:6219244
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/286641]
专题	高能物理研究所_实验物理中心
通讯作者	高杨
作者单位	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	高杨,Lei, Qiang,Han, Chao,等. 高性能氮化铝差分谐振式加速度计的结构设计[J]. 中国惯性技术学报,2018,26(1):69-75.
APA	高杨,Lei, Qiang,Han, Chao,&Gao, Yang.(2018).高性能氮化铝差分谐振式加速度计的结构设计.中国惯性技术学报,26(1),69-75.
MLA	高杨,et al."高性能氮化铝差分谐振式加速度计的结构设计".中国惯性技术学报 26.1(2018):69-75.