Structure design of AlN double-ended tuning fork resonators

doi:10.1117/12.2287156

	Structure design of AlN double-ended tuning fork resonators
	LEI Qiang , 高扬 ; GAO Yang ; Han Chao
刊名	Proceedings of SPIE - The International Society for Optical Engineering
	2017
卷号	10605 页码:1060518
关键词	micro-sensors AlN DETF sensitivity signal power
ISSN号	0277-786X
DOI	10.1117/12.2287156
其他题名	Proceedings of SPIE - The International Society for Optical Engineering
文献子类	Proceedings Paper
英文摘要	The resonant sensors based on aluminum nitride double-ended tuning fork (AlN DETF) have the characteristics of small size, good stability and reliability, fast response. In order to improve the sensitivity and resolution, it is necessary to analyze the influence of the structure parameters of vibrating beam on the sensitivity and signal power of AlN resonator. The multi-physics model of AlN DETF resonator was established to verify effect of single parameter on the sensitivity by pre-stressed eigenfrequency analysis. The relationships between signal power and length, width of vibrating beam were obtained by post-processing data of simulation results when the thickness remained constant. The results show that relative sensitivity and signal power are growing with opposite direction with the width or the length of the beam. Therefore, there is a design tradeoff between signal power and relative sensitivity of AlN resonator according to the process and structure strength. The optimized AlN DETF resonator was simulated, its sensitivity, signal power and Q are 56 Hz/mu N, 6.8e-4 nW and 958, respectively.
电子版国际标准刊号	1996-756X
会议地点	Changchun, PEOPLES R CHINA
WOS关键词	ALUMINUM NITRIDE
会议日期	JUL 23-25, 2017
WOS研究方向	Optics
语种	英语
ISBN号	978-1-5106-1707-0; 978-1-5106-1706-3
WOS记录号	WOS:000426279000040
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/284203]
专题	高能物理研究所_实验物理中心
作者单位	1.Chinese Acad Sci, Inst High Energy Phys, State Key Lab Particle Detect & Elect, Beijing 100049, Peoples R China 2.China Acad Engn Phys, Inst Elect Engn, Mianyang 621999, Peoples R China 3.Southwest Univ Sci & Technol, Sch Informat Engn, Mianyang 621010, Peoples R China
推荐引用方式 GB/T 7714	LEI Qiang , 高扬,GAO Yang,Han Chao. Structure design of AlN double-ended tuning fork resonators[J]. Proceedings of SPIE - The International Society for Optical Engineering,2017,10605:1060518.
APA	LEI Qiang , 高扬,GAO Yang,&Han Chao.(2017).Structure design of AlN double-ended tuning fork resonators.Proceedings of SPIE - The International Society for Optical Engineering,10605,1060518.
MLA	LEI Qiang , 高扬,et al."Structure design of AlN double-ended tuning fork resonators".Proceedings of SPIE - The International Society for Optical Engineering 10605(2017):1060518.