Design of a Structured Bulk Plasmon Illumination Source for Enhancing Plasmonic Cavity Superlens Imaging

doi:10.1007/s11468-017-0642-x

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	Design of a Structured Bulk Plasmon Illumination Source for Enhancing Plasmonic Cavity Superlens Imaging
	Du, Wenjuan; Kong, Weijie; Liu, Hongchao; Liu, Kaipeng; Wang, Changtao; Luo, Xiangang
刊名	PLASMONICS
	2018-08-01
卷号	13 期号:4 页码:1387-1392
关键词	Bulk plasmon illumination Cavity superlens Hyperbolic metamaterial
ISSN号	1557-1955
DOI	10.1007/s11468-017-0642-x
文献子类	J
英文摘要	A structured bulk plasmon illumination (BPI) source is designed for achieving a uniform high spatial frequency illumination field. By employing the hyperbolic metamaterial (HMM) composed of alternatively stacked metal and dielectric nanolayers, the deep subwavelength bulk plasmon polaritons (BPPs) can be launched. The obtained BPP modes are then utilized as a structured illumination source for improving the imaging resolution. More importantly, the BPI intensity can be improved remarkably by adding an extra Ag layer to the original BPI source. When two nano-slits are illuminated by the BPI source, the imaging resolution of plasmonic cavity superlens is improved obviously. Especially, after adding an extra Ag layer to the original BPI source, one can find the obvious improvement of the image contrast. The proposed BPI source promises some potential in near-field super resolution lithography.
WOS关键词	PHOTOLITHOGRAPHY ; EVANESCENT ; RESOLUTION ; LIMIT
语种	英语
WOS记录号	WOS:000438831400032
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9360]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
推荐引用方式 GB/T 7714	Du, Wenjuan,Kong, Weijie,Liu, Hongchao,et al. Design of a Structured Bulk Plasmon Illumination Source for Enhancing Plasmonic Cavity Superlens Imaging[J]. PLASMONICS,2018,13(4):1387-1392.
APA	Du, Wenjuan,Kong, Weijie,Liu, Hongchao,Liu, Kaipeng,Wang, Changtao,&Luo, Xiangang.(2018).Design of a Structured Bulk Plasmon Illumination Source for Enhancing Plasmonic Cavity Superlens Imaging.PLASMONICS,13(4),1387-1392.
MLA	Du, Wenjuan,et al."Design of a Structured Bulk Plasmon Illumination Source for Enhancing Plasmonic Cavity Superlens Imaging".PLASMONICS 13.4(2018):1387-1392.