Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates

doi:10.1364/OE.26.019524

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学技术研究室（十一室）

	Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates
	Liu, Cunding 1,2; Kong, Mingdong 1,2; Li, Bincheng 1,3
刊名	OPTICS EXPRESS
	2018-07-13
卷号	26 期号:15 页码:19524-19533
关键词	Antireflection coatings Atomic force microscopy Film thickness Lanthanum compounds Magnesium compounds Refractive index Spheres
ISSN号	1094-4087
DOI	10.1364/OE.26.019524
文献子类	J
英文摘要	A method to optimize the spectral performance of 193 nm antireflective (AR) coating with a broad range of angle of incidence (AOI) on strongly curved spherical substrates is described. In this method, the actual film thickness on test plates for single-layer LaF3 and MgF2 films are corrected by measuring the relationship between the film thickness on test plates and that on quartz crystal microbalance. Interface roughness in multi-layer AR coating is obtained from atomic force microscopy measurements and its effect on the spectrum of the multi-layer is taken into account in this method by being simulated as a homogeneous sublayer. Porosities of the sublayers in AR coatings are obtained by reversely engineering the residual reflectance of the coatings/substrate/coating stacks. The obtained refractive indices and thicknesses in the multilayer are then used for analysis and optimization of the spectrum of 193 nm AR coatings. For strongly curved spherical surfaces, spectrum uniformity of the AR coating is optimized by taking into consideration simultaneously the merit functions at different positions of spherical substrates. This work provides a general solution to the performance optimization of 193 nm AR coatings with broad AOI range and on strongly curved spherical substrates. (C) 2018 Optical Society of America under the terms ol the OSA Open Access Publishing Agreement
WOS关键词	MAGNESIUM FLUORIDE FILMS ; OPTICAL-CONSTANTS ; REFRACTIVE-INDEX ; THIN-FILM ; INTERFACE ROUGHNESS ; LAF3 ; INHOMOGENEITY ; THICKNESS ; MICROSTRUCTURE
语种	英语
WOS记录号	WOS:000439472400062
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9343]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of the Chinese Academy of Sciences, Beijing; 100049, China; 3.School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu; 610054, China
推荐引用方式 GB/T 7714	Liu, Cunding,Kong, Mingdong,Li, Bincheng. Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates[J]. OPTICS EXPRESS,2018,26(15):19524-19533.
APA	Liu, Cunding,Kong, Mingdong,&Li, Bincheng.(2018).Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates.OPTICS EXPRESS,26(15),19524-19533.
MLA	Liu, Cunding,et al."Performance optimization of 93 nm antireflective coatings with wide incident angle ranges on strongly curved spherical substrates".OPTICS EXPRESS 26.15(2018):19524-19533.