NiCrNxinterlayer thickness dependence of spectral performance and environmental durability of protected-silver mirrors

doi:10.1117/1.OE.57.4.045101

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学技术研究室（十一室）

	NiCrNxinterlayer thickness dependence of spectral performance and environmental durability of protected-silver mirrors
	Xu, Xu 1,2; Li, Bincheng 1,3; He, Wenyan 1,2; Wang, Changjun 1; Wei, Ming 1
刊名	Optical Engineering
	2018-04-01
卷号	57 期号:4 页码:045101
关键词	Chromium compounds Corrosion protection Corrosion resistance Durability Environmental testing Mirrors Reflection Scanning electron microscopy Silver
ISSN号	0091-3286
DOI	10.1117/1.OE.57.4.045101
文献子类	J
英文摘要	Gemini-style protected-silver mirror (Sub/NiCrNx/Ag/NiCrNx/SiNx/Air) is a suitable choice for optical instruments requiring both long-term environmental durability and high broadband reflectance. Three Gemini-style protected-silver mirrors with NiCrNxinterlayer thicknesses between 0.1 and 0.6 nm were prepared by magnetron sputtering, and the dependences of spectral properties and environmental durability of these protected-silver mirrors on the thickness of NiCrNxinterlayer between the silver layer and SiNxlayer were investigated in-depth. The reflectance, transmittance and total scattering loss measurements, optical microscope, and scanning electron microscope imaging were employed to characterize the spectral properties and surface morphology, and accelerated environmental tests, including humidity test and salt fog test, were applied to investigate the environmental durability. The experimental results showed that both optical and corrosion-resistant properties of protected-silver mirrors were NiCrNxinterlayer thickness dependent, and an optimum NiCrNxinterlayer thickness should be ∼0.3 nm for Gemini-style protected-silver mirrors to have reasonably both high reflectance in a broadband spectral range from visible to far infrared and good corrosion resistance for long-lifetime applications in harsh environments. © 2018 Society of Photo-Optical Instrumentation Engineers (SPIE).
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9323]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	1.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China; 2.Graduate School of the Chinese Academy of Sciences, Beijing, China; 3.University of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, Chengdu, China
推荐引用方式 GB/T 7714	Xu, Xu,Li, Bincheng,He, Wenyan,et al. NiCrNxinterlayer thickness dependence of spectral performance and environmental durability of protected-silver mirrors[J]. Optical Engineering,2018,57(4):045101.
APA	Xu, Xu,Li, Bincheng,He, Wenyan,Wang, Changjun,&Wei, Ming.(2018).NiCrNxinterlayer thickness dependence of spectral performance and environmental durability of protected-silver mirrors.Optical Engineering,57(4),045101.
MLA	Xu, Xu,et al."NiCrNxinterlayer thickness dependence of spectral performance and environmental durability of protected-silver mirrors".Optical Engineering 57.4(2018):045101.