Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes

doi:10.1021/acsami.9b02049

	Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes
	Yang, Jun1,2 ; Luo, Shi 1; Zhou, Xi 1; Li, Jialu 1; Fu, Jianting1 ; Yang, Weidong 3; Wei, Dapeng1
刊名	ACS APPLIED MATERIALS & INTERFACES
	2019-04-24
卷号	11 期号:16 页码:14997-15006
关键词	capacitive pressure sensor microconformal graphene electrodes ultrasensitive flexible tunable
ISSN号	1944-8244
DOI	10.1021/acsami.9b02049
通讯作者	Yang, Weidong(weidong.yang@nus.edu.sg) ; Wei, Dapeng(dpwei@cigit.ac.cn)
英文摘要	High-performance flexible pressure sensors are highly desirable in health monitoring, robotic tactile, and artificial intelligence. Construction of microstructures in dielectrics and electrodes is the dominating approach to improving the performance of capacitive pressure sensors. Herein, we have demonstrated a novel three-dimensional microconformal graphene electrode for ultrasensitive and tunable flexible capacitive pressure sensors. Because the fabrication process is controllable, the morphologies of the graphene that is perfectly conformal with the electrode are controllable consequently. Multiscale morphologies ranging from a few nanometers to hundreds of nanometers, even to tens of micrometers, have been systematically investigated, and the high-performance capacitive pressure sensor with high sensitivity (3.19 kPa(-1)), fast response (30 ms), ultralow detection limit (1 mg), tunable-sensitivity, high flexibility, and high stability was obtained. Furthermore, an ultrasensitivity of 7.68 kPa(-1) was successfully achieved via symmetric double microconformal graphene electrodes. The finite element analysis indicates that the microstructured graphene electrode can enhance large deformation and thus effectively improve the sensitivity. Additionally, the proposed pressure sensors are demonstrated with practical applications including insect crawling detection, wearable health monitoring, and force feedback of robot tactile sensing with a sensor array. The microconformal graphene may provide a new approach to fabricating controllable microstructured electrodes to enhance the performance of capacitive pressure sensors and has great potential for innovative applications in wearable health-monitoring devices, robot tactile systems, and human-machine interface systems.
资助项目	National Natural Science Foundation of China[NSFC 61504148] ; Basic Science and Frontier Technology Research Program of Chongqing[cstc2016jcyjA0315] ; Basic Science and Frontier Technology Research Program of Chongqing[cstc2017shmsA50001] ; Youth Innovation Promotion Association of CAS[2015316] ; Project of Chongqing brain science Collaborative Innovation Center ; Project of CAS Western Young Scholar ; Project of CQCSTC[cstc2017zdcy-zdyfX0001]
WOS研究方向	Science & Technology - Other Topics ; Materials Science
语种	英语
出版者	AMER CHEMICAL SOC
WOS记录号	WOS:000466052800052
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/7901]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	Yang, Weidong; Wei, Dapeng
作者单位	1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 117576, Singapore
推荐引用方式 GB/T 7714	Yang, Jun,Luo, Shi,Zhou, Xi,et al. Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes[J]. ACS APPLIED MATERIALS & INTERFACES,2019,11(16):14997-15006.
APA	Yang, Jun.,Luo, Shi.,Zhou, Xi.,Li, Jialu.,Fu, Jianting.,...&Wei, Dapeng.(2019).Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes.ACS APPLIED MATERIALS & INTERFACES,11(16),14997-15006.
MLA	Yang, Jun,et al."Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes".ACS APPLIED MATERIALS & INTERFACES 11.16(2019):14997-15006.