Fabrication of broadband antireflection coatings using wavelength-indirect broadband optical monitoring

doi:10.1016/j.ijleo.2017.11.031

	Fabrication of broadband antireflection coatings using wavelength-indirect broadband optical monitoring
	Lv, Qipeng 1,2; Huang, Mingliang 1; Deng, Songwen 2; Li, Gang 2
刊名	OPTIK
	2018
卷号	156 页码:325-332
关键词	Ion Beam Sputtering Direct Broadband Optical Monitoring Broadband Antireflection Coating Wavelength-indirect Broadband Optical Monitoring
ISSN号	0030-4026
DOI	10.1016/j.ijleo.2017.11.031
文献子类	Article
英文摘要	Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, ultra-broadband antireflection coating and etc., whose working wavelength is out of monitoring wavelength range, are difficult to be fabricated using direct broadband optical monitoring (BBOM). In this paper, a broadband antireflection (AR) coating in the wavelength range from 1300 nm to 2000 nm at 45 incident was designed and deposited by dual ion beam sputtering (DIBS). Ta2O5 and SiO2 were chosen as high and low refractive index coating materials, respectively. The optimized coating structure contains 4 non-quarter-wave (QW) layers. In order to obtain high transmittance, the most important is to realize the thickness accurate control. Due to the limitation of the monitoring wavelength range, which is only from 450 nm to 1000 nm, a wavelength-indirect broadband optical monitoring strategy was successfully employed to control the layers thickness during the deposition process. At last, a good agreement between theoretical and measured transmittance is obtained. The maximum error (the first layer) is only about 5.3% and the minimum error (the third layer) is about -0.25% base on the results of reverse engineering analysis. (C) 2017 Elsevier GmbH. All rights reserved.
WOS关键词	QUARTERWAVE MULTILAYER FILTERS ; THICKNESS ERRORS
WOS研究方向	Optics
语种	英语
出版者	ELSEVIER GMBH, URBAN & FISCHER VERLAG
WOS记录号	WOS:000424311500042
内容类型	期刊论文
源URL	[http://cas-ir.dicp.ac.cn/handle/321008/168788]
专题	大连化学物理研究所_中国科学院大连化学物理研究所
通讯作者	Huang, Mingliang; Li, Gang
作者单位	1.Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China 2.Chinese Acad Sci, Dalian Inst Chem Phys, Key Lab Chem Lasers, Dalian 116023, Peoples R China
推荐引用方式 GB/T 7714	Lv, Qipeng,Huang, Mingliang,Deng, Songwen,et al. Fabrication of broadband antireflection coatings using wavelength-indirect broadband optical monitoring[J]. OPTIK,2018,156:325-332.
APA	Lv, Qipeng,Huang, Mingliang,Deng, Songwen,&Li, Gang.(2018).Fabrication of broadband antireflection coatings using wavelength-indirect broadband optical monitoring.OPTIK,156,325-332.
MLA	Lv, Qipeng,et al."Fabrication of broadband antireflection coatings using wavelength-indirect broadband optical monitoring".OPTIK 156(2018):325-332.