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Compensation ratio-dependent concentration of a vinh4 complex in n-type liquid encapsulated czochralski inp
Fung, S; Zhao, YW; Beling, CD; Xu, XL; Gong, M; Sun, NF; Sun, TN; Chen, XD; Zhang, RG; Liu, SL
刊名Applied physics letters
1998-08-01
卷号73期号:9页码:1275-1277
ISSN号0003-6951
通讯作者Fung, s()
英文摘要The concentration of hydroen-indium vacancy complex vinh4 in liquid encapsulated czochralski undoped and fe-doped n-type inp has been studied by low-temperature infrared absorption spectroscopy. the vinh4 complex is found to be a dominant intrinsic shallow donor defect with concentrations up to similar to 10(16) cm(-3) in as-grown liquid encapsulated czochralski inp. the concentration of the vinh4 complex is found to increase with the compensation ratio in good agreement with the proposed defect formation model of walukiewicz [w. walukiewicz, phys. rev. b 37, 4760 (1998); appl. phys. lett. 54, 2094 (1989)], which predicts a fermi-level-dependent concentration of amphoteric defects. (c) 1998 american institute of physics, [s0003-6951(98)04435-0].
WOS关键词SEMICONDUCTORS ; HYDROGEN ; DEFECTS ; MECHANISM
WOS研究方向Physics
WOS类目Physics, Applied
语种英语
出版者AMER INST PHYSICS
WOS记录号WOS:000083351600037
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2428615
专题半导体研究所
通讯作者Fung, S
作者单位1.Univ Hong Kong, Dept Phys, Hong Kong, Peoples R China
2.Hebei Semicond Res Inst, Shijiazhuang, Hebei, Peoples R China
3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Fung, S,Zhao, YW,Beling, CD,et al. Compensation ratio-dependent concentration of a vinh4 complex in n-type liquid encapsulated czochralski inp[J]. Applied physics letters,1998,73(9):1275-1277.
APA Fung, S.,Zhao, YW.,Beling, CD.,Xu, XL.,Gong, M.,...&Liu, XL.(1998).Compensation ratio-dependent concentration of a vinh4 complex in n-type liquid encapsulated czochralski inp.Applied physics letters,73(9),1275-1277.
MLA Fung, S,et al."Compensation ratio-dependent concentration of a vinh4 complex in n-type liquid encapsulated czochralski inp".Applied physics letters 73.9(1998):1275-1277.
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