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Molecular beam epitaxy of gasb on gaas substrates with alsb/gasb compound buffer layers
Hao, Ruiting1,2; Deng, Shukang1; Shen, Lanxian1; Yang, Peizhi1; Tu, Jielei1; Liao, Hua1; Xu, Yingqiang2; Niu, Zhichuan2
刊名Thin solid films
2010-10-29
卷号519期号:1页码:228-230
关键词Gallium arsenide Gallium antimonide Gallium antimonide/aluminum antimonide Superlattices Molecular beam epitaxy
ISSN号0040-6090
DOI10.1016/j.tsf.2010.08.001
通讯作者Hao, ruiting(ruitinghao@semi.ac.cn)
英文摘要Gasb films with alsb/gasb compound buffer layers were grown by molecular beam epitaxy on gaas (001) substrates. the crystal quality and optical properties were studied by high resolution transition electron microscopy and low temperature photoluminescence spectra (pl), respectively. it was found that the alsb/gasb compound buffer layers can restrict the dislocations into gasb epilayers. the intensity of pl spectra of gasb layer becomes large with the increasing the periods of alsb/gasb superlattices, indicating that the optical quality of gasb films is improved. (c) 2010 elsevier b.v. all rights reserved.
WOS关键词VAPOR-PHASE EPITAXY ; SURFACE-MORPHOLOGY ; GROWTH ; SUPERLATTICES ; TEMPERATURE ; RELAXATION ; DETECTORS ; GAAS(001) ; MOCVD ; FILMS
WOS研究方向Materials Science ; Physics
WOS类目Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种英语
出版者ELSEVIER SCIENCE SA
WOS记录号WOS:000283955200040
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2428087
专题半导体研究所
通讯作者Hao, Ruiting
作者单位1.Yunnan Normal Univ, Inst Solar Energy, Key Lab Renewable Energy Adv Mat & Mfg Technol, Educ Minist, Kunming 650092, Yunnan Province, Peoples R China
2.Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Hao, Ruiting,Deng, Shukang,Shen, Lanxian,et al. Molecular beam epitaxy of gasb on gaas substrates with alsb/gasb compound buffer layers[J]. Thin solid films,2010,519(1):228-230.
APA Hao, Ruiting.,Deng, Shukang.,Shen, Lanxian.,Yang, Peizhi.,Tu, Jielei.,...&Niu, Zhichuan.(2010).Molecular beam epitaxy of gasb on gaas substrates with alsb/gasb compound buffer layers.Thin solid films,519(1),228-230.
MLA Hao, Ruiting,et al."Molecular beam epitaxy of gasb on gaas substrates with alsb/gasb compound buffer layers".Thin solid films 519.1(2010):228-230.
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