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	Study on the perfection of in situ p-injection synthesis lec-inp single crystals
	Zhou, XL; Zhao, YW; Sun, NF; Yang, GY; Xu, YQ; Sun, TN
刊名	Journal of crystal growth
	2004-03-15
卷号	264期号:1-3页码:17-20
关键词	Etch-pit density Phosphorus-rich Pl-mapping Indium phosphide
ISSN号	0022-0248
DOI	10.1016/j.jcrysgro.2003.12.042
通讯作者	Zhou, xl(tnsun@heinfo.net)
英文摘要	Undoped, s-doped and fe-doped inp crystals with diameter up to 4-inch have been pulled in drop 10 0 drop -direction under p-rich condition by a rapid p-injection in situ synthesis liquid encapsulated czochralski (lec) method. high speed photoluminescence mapping, etch-pit density (epd) mapping and scanning electron microscopy have been used to characterize the samples of the single crystal ingots. dislocations and electrical homogeneity of these samples are investigated and compared. by controlling the thermal field and the solid-liquid interface shape, 4-inch low-epd inp single crystals have been successfully grown by the rapid p-injection synthesis lec method. the epd across the wafer of the ingots is less than 5 x 10(4) cm(-2). cluster defects with a pore center are observed in the p-rich lec grown inp ingots. these defects are distributed irregularly on a wafer and are surrounded by a high concentration of dislocations. the uniformity of the pl intensity across the wafer is influenced by these defects. (c) 2004 elsevier b.v. all rights reserved.
WOS关键词	GROWTH
WOS研究方向	Crystallography ; Materials Science ; Physics
WOS类目	Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000220345400004
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426250
专题	半导体研究所
通讯作者	Zhou, XL
作者单位	1.Hebei Semicond Res Inst, Hebei 050051, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Zhou, XL,Zhao, YW,Sun, NF,et al. Study on the perfection of in situ p-injection synthesis lec-inp single crystals[J]. Journal of crystal growth,2004,264(1-3):17-20.
APA	Zhou, XL,Zhao, YW,Sun, NF,Yang, GY,Xu, YQ,&Sun, TN.(2004).Study on the perfection of in situ p-injection synthesis lec-inp single crystals.Journal of crystal growth,264(1-3),17-20.
MLA	Zhou, XL,et al."Study on the perfection of in situ p-injection synthesis lec-inp single crystals".Journal of crystal growth 264.1-3(2004):17-20.

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