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	Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate
	Deng, Songwen1,2; Qi, Hongji1; Wei, Chaoyang1; Yi, Kui1; Fan, Zhengxiu1; Shao, Jianda1
刊名	Applied surface science
	2009-12-15
卷号	256期号:5页码:1492-1495
关键词	Roughness Smoothing effect C film Soft x-ray multilayer reflector
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2009.09.009
通讯作者	Shao, jianda(buaa_dsw@163.com)
英文摘要	Soft x-ray multilayer reflectors must be deposited on super-smooth surface such as super-polished silicon wafers or glasses, which are complicate, time-consuming and expensive to produce. to overcome this shortage, c films deposited by rf magnetron sputtering were considered to smooth the k9 glass substrates' surface in the present paper. the structure of c films was systematically studied by xrd and raman spectrum. the surface morphology and rms-roughness were obtained by afm. then, we calculated the impact of the c layers on the reflectivity curve of mo/si soft x-ray multilayer reflector around 13.5 nm. the c films exhibit typical amorphous state. with the increasing of power and thickness, the content of sp3 hybrid bonding decreases while the amount or size of well-organized graphite clusters increases. the surface rms-roughness decreases from 2.4 nm to 0.62 nm after smoothed by an 80 nm thick c layer deposited in 500 w, which is the smoothest c layer surface we have obtained. the calculation results show that the theoretical normal incidence reflectivity of mo/si multilayer at 13.5 nm increases from 7% to 63%. (c) 2009 elsevier b.v. all rights reserved.
WOS关键词	RAY MULTILAYER MIRRORS ; CARBON BUFFER LAYERS
WOS研究方向	Chemistry ; Materials Science ; Physics
WOS类目	Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000272345400042
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2395082
专题	中国科学院大学
通讯作者	Shao, Jianda
作者单位	1.Chinese Acad Sci, Opt Films Technol R&D Ctr, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100038, Peoples R China
推荐引用方式 GB/T 7714	Deng, Songwen,Qi, Hongji,Wei, Chaoyang,et al. Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate[J]. Applied surface science,2009,256(5):1492-1495.
APA	Deng, Songwen,Qi, Hongji,Wei, Chaoyang,Yi, Kui,Fan, Zhengxiu,&Shao, Jianda.(2009).Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate.Applied surface science,256(5),1492-1495.
MLA	Deng, Songwen,et al."Effect of amorphous c films deposited by rf magnetron sputtering on smoothing k9 glass substrate".Applied surface science 256.5(2009):1492-1495.

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