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	Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature
	Shi, Jianhua1,2; Shen, Leilei1,2; Meng, Fanying1; Liu, Zhengxin1
刊名	Materials letters
	2016-11-01
卷号	182页码:32-35
关键词	Highly crystalline Ito thin film Rpd Room temperature
ISSN号	0167-577X
DOI	10.1016/j.matlet.2016.06.084
通讯作者	Meng, fanying(fymeng@mail.sim.ac.cn)
英文摘要	Highly crystalline indium tin oxide (ito) films were fabricated by reactive plasma deposition (rpd) technique at room temperature. the effects of oxygen partial pressure on structural, optical and electrical properties of the ito film were investigated. an interesting growth mode transition from 3 dimensions (3d) to 2 dimensions (2d) was observed. it was found that this transition in growth mode was accompanied by a phase change from amorphous to crystalline. in addition, the obtained ito film showed a metal-semiconductor transition property with various transition temperatures from 90 k to 175 k. by optimizing oxygen partial pressure value, film with low resistivity of 2.3 x 10(-4) omega cm, carrier mobility high up to 35 cm(2)/v s and average optical transmittance over 90% was developed at room temperature. (c) 2016 elsevier b.v. all rights reserved.
WOS关键词	THIN-FILMS
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000382338400008
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2375418
专题	中国科学院大学
通讯作者	Meng, Fanying
作者单位	1.Chinese Acad Sci, SIMIT, Res Ctr New Energy Technol, Shanghai 201800, Peoples R China 2.UCAS, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Shi, Jianhua,Shen, Leilei,Meng, Fanying,et al. Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature[J]. Materials letters,2016,182:32-35.
APA	Shi, Jianhua,Shen, Leilei,Meng, Fanying,&Liu, Zhengxin.(2016).Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature.Materials letters,182,32-35.
MLA	Shi, Jianhua,et al."Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature".Materials letters 182(2016):32-35.

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