| Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control | |
| Wang, Chunchang; Wang, Jian; Qi, Haochen; Yang, Wenhua; Zhang, Jian; Cheng, Cheng; Fang, Xiaobo; Wu, Jayne | |
| 刊名 | MICROFLUIDICS AND NANOFLUIDICS
 |
| 2019 | |
| 卷号 | Vol.23 No.1 |
| 关键词 | Nanoparticle detection IC manufacturing AC electrokinetics Capacitance sensing |
| ISSN号 | 1613-4982 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2203951 |
| 专题 | 安徽大学 |
| 作者单位 | 1.Univ Tennessee, Dept Elect Engn & Comp Sci, Knoxville, TN 37996 USA 2.Hefei Univ Technol, Sch Elect Sci & Appl Phys, Hefei 230009, Anhui, Peoples R China 3.Anhui Univ, Sch Phys & Mat Sci, Lab Dielect Funct Mat, Hefei 230601, Anhui, Peoples R China 4.Morehead State Univ, Dept Engn & Technol Management, Morehead, KY 40351 USA |
| 推荐引用方式 GB/T 7714 | Wang, Chunchang,Wang, Jian,Qi, Haochen,et al. Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control[J]. MICROFLUIDICS AND NANOFLUIDICS,2019,Vol.23 No.1. |
| APA | Wang, Chunchang.,Wang, Jian.,Qi, Haochen.,Yang, Wenhua.,Zhang, Jian.,...&Wu, Jayne.(2019).Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control.MICROFLUIDICS AND NANOFLUIDICS,Vol.23 No.1. |
| MLA | Wang, Chunchang,et al."Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control".MICROFLUIDICS AND NANOFLUIDICS Vol.23 No.1(2019). |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论