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	Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control
	Chunchang Wang; Cheng Cheng; Haochen Qi; Jian Wang; Xiaobo Fang; Wenhua Yang; Jian Zhang; Jayne Wu
刊名	Microfluidics and Nanofluidics
	2019
卷号	Vol.23 No.1
关键词	Nanoparticle detection IC manufacturing AC electrokinetics Capacitance sensing
ISSN号	1613-4982;1613-4990
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2202104
专题	安徽大学
作者单位	1.Department of Electrical Engineering and Computer Science,The University of Tennessee,Knoxville,USA 2.Department of Engineering and Technology Management,Morehead State University,Morehead,USA 3.Laboratory of Dielectric Functional Materials, School of Physics and Material Science,Anhui University,Hefei,China 4.School of Electronic Science and Applied Physics, Hefei University of Technology,Hefei,China
推荐引用方式 GB/T 7714	Chunchang Wang,Cheng Cheng,Haochen Qi,et al. Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control[J]. Microfluidics and Nanofluidics,2019,Vol.23 No.1.
APA	Chunchang Wang.,Cheng Cheng.,Haochen Qi.,Jian Wang.,Xiaobo Fang.,...&Jayne Wu.(2019).Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control.Microfluidics and Nanofluidics,Vol.23 No.1.
MLA	Chunchang Wang,et al."Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control".Microfluidics and Nanofluidics Vol.23 No.1(2019).

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