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	Ion implantation fabricated integrated gaas quantum well multi-wavelength light emitting chip
	Li, ZF; Liu, XQ; Chen, CM; Lu, W; Shen, XC; Zhu, DZ; Pan, HC; Hu, J; Li, MQ
刊名	Journal of infrared and millimeter waves
	2000-06-01
卷号	19期号:3页码:181-184
关键词	Gaas quantum well Ion implantation Interface intermixing Photoluminescence
ISSN号	1001-9014
通讯作者	Li, zf()
英文摘要	An integrated algaas/gaas single quantum well multi-wavelength light emitting chip fabricated by ion implantation and combined technology was reported. by interface intermixing more than 20 gaas quantum well light emitting elements whose photoluminescence wavelength ranges from 787 to about 724nm were obtained. the effect of different doses of as+ and h+ and their combination on the shift of the photoluminescence wavelength of the quantum well was studied. with ion implantation and combined method the fabrication processes were drastically simplified. such a. kind of multi-wavelength light emitting chip has great potentiality both on the application of wavelength division multiplexing (wdm), in which many lasers with different wavelengths are required and on the setting up of a database for optimizing the ion implantation processes.
WOS关键词	LASERS
WOS研究方向	Optics
WOS类目	Optics
语种	英语
出版者	SCIENCE PRESS
WOS记录号	WOS:000087691900005
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2176308
专题	高能物理研究所
通讯作者	Li, ZF
作者单位	1.Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Nucl Res, Lab Nucl Anal Tech, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Li, ZF,Liu, XQ,Chen, CM,et al. Ion implantation fabricated integrated gaas quantum well multi-wavelength light emitting chip[J]. Journal of infrared and millimeter waves,2000,19(3):181-184.
APA	Li, ZF.,Liu, XQ.,Chen, CM.,Lu, W.,Shen, XC.,...&Li, MQ.(2000).Ion implantation fabricated integrated gaas quantum well multi-wavelength light emitting chip.Journal of infrared and millimeter waves,19(3),181-184.
MLA	Li, ZF,et al."Ion implantation fabricated integrated gaas quantum well multi-wavelength light emitting chip".Journal of infrared and millimeter waves 19.3(2000):181-184.

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