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	Preparation of -alumina/silica core-shell abrasives and their chemical mechanical polishing performances on sapphire substrates
	Wang, Xin[1]; Lei, Hong[2]
刊名	MICRO & NANO LETTERS
	2018
卷号	13页码:1315-1320
关键词	scanning electron microscopy abrasives surface roughness friction X-ray photoelectron spectra abrasion secondary ion mass spectra silicon compounds alumina transmission electron microscopy chemical mechanical polishing composite materials materials preparation time of flight mass spectra surface morphology sapphire core-shell structure time-of-flight secondary ion mass spectroscopy scanning electron microscopy transmission electron microscopy sapphire substrates che
ISSN号	1750-0443
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2170436
专题	上海大学
作者单位	1.[1]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Wang, Xin[1],Lei, Hong[2]. Preparation of -alumina/silica core-shell abrasives and their chemical mechanical polishing performances on sapphire substrates[J]. MICRO & NANO LETTERS,2018,13:1315-1320.
APA	Wang, Xin[1],&Lei, Hong[2].(2018).Preparation of -alumina/silica core-shell abrasives and their chemical mechanical polishing performances on sapphire substrates.MICRO & NANO LETTERS,13,1315-1320.
MLA	Wang, Xin[1],et al."Preparation of -alumina/silica core-shell abrasives and their chemical mechanical polishing performances on sapphire substrates".MICRO & NANO LETTERS 13(2018):1315-1320.

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