Light extraction efficiency improvement and strain relaxation in InGaN/GaN multiple quantum well nanopillars
Wang H; Yang H; Yang H; Zhu JJ; Zhao DG; Wang H; Wang LJ; Wang LJ; Zhu JH; Jiang DS
刊名journal of applied physics
2011
卷号109期号:8页码:article no.84339
ISSN号0021-8979
通讯作者zhang, sm, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. smzhang@red.semi.ac.cn
学科主题光电子学
收录类别SCI
资助信息national natural science foundation of china [60506001, 60776047, 60976045, 60836003]; national basic research programme of china [2007cb936700]; national science foundation for distinguished young scholars [60925017]
语种英语
公开日期2011-07-05 ; 2011-07-15
附注light extraction efficiency improvement and strain relaxation were observed in ingan/gan multiple quantum well (mqw) nanopillars. ingan/gan mqw-based led nanopillar arrays with different diameters varying from about 120 to 250 nm were fabricated via inductively coupled plasma etching using ni self-assembled nanodots as etching mask. the ray trace method and tibercad were used to calculate the light extraction efficiency and strain relaxation in the nanopillars. remarkably improved light extraction efficiency and strain relaxation were obtained from the calculation results in the nanopillar structures. (c) 2011 american institute of physics. [doi:10.1063/1.3580477]
内容类型期刊论文
源URL[http://ir.semi.ac.cn/handle/172111/20959]  
专题半导体研究所_集成光电子学国家重点实验室
推荐引用方式
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Wang H,Yang H,Yang H,et al. Light extraction efficiency improvement and strain relaxation in InGaN/GaN multiple quantum well nanopillars[J]. journal of applied physics,2011,109(8):article no.84339.
APA Wang H.,Yang H.,Yang H.,Zhu JJ.,Zhao DG.,...&Zhang SM.(2011).Light extraction efficiency improvement and strain relaxation in InGaN/GaN multiple quantum well nanopillars.journal of applied physics,109(8),article no.84339.
MLA Wang H,et al."Light extraction efficiency improvement and strain relaxation in InGaN/GaN multiple quantum well nanopillars".journal of applied physics 109.8(2011):article no.84339.
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