An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions

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	An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions
	Liu YF ; Xie J ; Zhang ML ; Yang JL ; Yang FH
刊名	journal of microelectromechanical systems
	2011
卷号	20 期号:2 页码:470-475
关键词	Galvanic corrosion polysilicon resistivity titanium (Ti) redox sacrificial layer POLYSILICON OXIDATION
ISSN号	1057-7157
通讯作者	liu, yf, chinese acad sci, inst semicond, beijing 100083, peoples r china. jlyang@semi.ac.cn
学科主题	微电子学
收录类别	SCI
资助信息	ministry of science and technology of china [2009cb320305, 2011cb933102]
语种	英语
公开日期	2011-07-06 ; 2011-07-15
附注	this paper presents an effective method to restrain galvanic corrosion of polycrystalline silicon (polysilicon) that is electrically coupled with noble metals of microelectromechanical systems (mems) devices by hydrofluoric-acid (hf)-based solutions. a titanium (ti) redox sacrificial layer is added on the noble-metal layer and then covered by photoresist. benefiting from the lower electrochemical potential of ti than that of polysilicon in hf-based solutions, ti is preferentially corroded in hf-based solutions, and the polysilicon is well protected. the thickness of the ti layer should be optimized for effectively suppressing galvanic corrosion of polysilicon; a 50-nm-thick ti film is able to preserve the resistivities of polysilicon unchanged in concentrated hf (49% hf by weight percent) solution for 1 h. this approach is simple and compatible with mems batch-fabrication technology and provides a solution for the longstanding issue in microfabrication technology, i.e., galvanic attack to the polysilicon structural layer by hf-based solutions. [2010-0322]
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/21327]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Liu YF,Xie J,Zhang ML,et al. An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions[J]. journal of microelectromechanical systems,2011,20(2):470-475.
APA	Liu YF,Xie J,Zhang ML,Yang JL,&Yang FH.(2011).An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions.journal of microelectromechanical systems,20(2),470-475.
MLA	Liu YF,et al."An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions".journal of microelectromechanical systems 20.2(2011):470-475.