Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology

doi:10.3390/s18020340

	Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology
	Lin, Lin 1; Ma, Mingsheng ; Zhang, Faqiang ; Liu, Feng ; Liu, Zhifu ; Li, Yongxiang 2
刊名	SENSORS
	2018
卷号	18 期号:2
关键词	wireless pressure sensor LTCC LC resonator cavity
ISSN号	1424-8220
DOI	10.3390/s18020340
英文摘要	This paper presents a kind of passive wireless pressure sensor comprised of a planar spiral inductor and a cavity parallel plate capacitor fabricated through low-temperature co-fired ceramic (LTCC) technology. The LTCC material with a low Young's modulus of similar to 65 GPa prepared by our laboratory was used to obtain high sensitivity. A three-step lamination process was applied to construct a high quality cavity structure without using any sacrificial materials. The effects of the thickness of the sensing membranes on the sensitivity and detection range of the pressure sensors were investigated. The sensor with a 148 mu m sensing membrane showed the highest sensitivity of 3.76 kHz/kPa, and the sensor with a 432 mu m sensing membrane presented a high detection limit of 2660 kPa. The tunable sensitivity and detection limit of the wireless pressure sensors can meet the requirements of different scenes.
学科主题	Chemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
出版者	MDPI
WOS记录号	WOS:000427544000023
资助机构	The authors would like to acknowledge the financial support from the National Key Research and Development Program of China (2017YFB0406303), the National Natural Science Foundation of China (NSFC 61501438), and the Youth Innovation Promotion Association of CAS. ; The authors would like to acknowledge the financial support from the National Key Research and Development Program of China (2017YFB0406303), the National Natural Science Foundation of China (NSFC 61501438), and the Youth Innovation Promotion Association of CAS.
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/24501]
专题	中国科学院上海硅酸盐研究所
作者单位	1.Shanghai Inst Ceram, CAS Key Lab Inorgan Funct Mat & Devices, 1295 Dingxi Rd, Shanghai 200050, Peoples R China 2.Univ Chinese Acad Sci, 19 Yuquan Rd, Beijing 100049, Peoples R China 3.RMIT Univ, Sch Engn, Melbourne, Vic 3001, Australia
推荐引用方式 GB/T 7714	Lin, Lin,Ma, Mingsheng,Zhang, Faqiang,et al. Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology[J]. SENSORS,2018,18(2).
APA	Lin, Lin,Ma, Mingsheng,Zhang, Faqiang,Liu, Feng,Liu, Zhifu,&Li, Yongxiang.(2018).Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology.SENSORS,18(2).
MLA	Lin, Lin,et al."Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology".SENSORS 18.2(2018).