| Thermopile-structured micro thermal conductivity vacuum sensor | |
| Ma B(马斌) | |
| 刊名 | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
 |
| 2009 | |
| 学科主题 | 红外探测器材料与器件 |
| 语种 | 英语 |
| 公开日期 | 2011-07-15 |
| 内容类型 | 期刊论文 |
| 源URL | [http://202.127.1.142/handle/181331/1645]  |
| 专题 | 上海技术物理研究所_上海技物所 |
| 推荐引用方式 GB/T 7714 | Ma B. Thermopile-structured micro thermal conductivity vacuum sensor[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2009. |
| APA | 马斌.(2009).Thermopile-structured micro thermal conductivity vacuum sensor.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology. |
| MLA | 马斌."Thermopile-structured micro thermal conductivity vacuum sensor".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology (2009). |
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