The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2018专题

	The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge
	Wang, Aiying; Zuo, Xiao; Chen, Rende; Liu, Jingzhou; Ke, Peiling
刊名	AIP ADVANCES
	2018
卷号	8 期号:1
关键词	Nanocomposite Coatings Sputter-deposition Plasma Microstructure Films Bias
英文摘要	The electrical characteristics and spectroscopic properties have been comprehensively investigated in a DC superimposed high power impulse magnetron sputtering (DC-HiPIMS) deposition system in this paper. The influence of superimposed DC current on the variation of target and substrate currentw aveforms, active species and electron temperatures with pulse voltages are focused. The peak target currents in DC-HiPIMS are lower than in HiPIMS. The time scales of the two main discharge processes like ionization and gas rarefaction in DC-HiPIMS are analyzed. When the pulse voltage is higher than 600 V, the gas rarefaction effect becomes apparent. Overall, the ionization process is found to be dominant in the initial similar to 00 mu s during each pulse. The active species of Ar and Cr in DC-HiPIMS are higher than in HiPIMS unless that the pulse voltage reaches 900 V. However, the ionization degree in HiPIMS exceeds that in DC-HiPIMS at around 600 V. The electron temperature calculated by modified Boltzmann plot method based on corona model has a precipitous increase from 0.87 to 25.0 eV in HiPIMS, but varies mildly after the introduction of the superimposed DC current. Additionally, the current from plasma flowing to the substrate is improved when a DC current is superimposed with HiPIMS. (c) 2018 Author(s).
学科主题	Chemistry
语种	英语
公开日期	2018-12-04
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/16924]
专题	2018专题
推荐引用方式 GB/T 7714	Wang, Aiying,Zuo, Xiao,Chen, Rende,et al. The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge[J]. AIP ADVANCES,2018,8(1).
APA	Wang, Aiying,Zuo, Xiao,Chen, Rende,Liu, Jingzhou,&Ke, Peiling.(2018).The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge.AIP ADVANCES,8(1).
MLA	Wang, Aiying,et al."The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge".AIP ADVANCES 8.1(2018).