Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering

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	Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering
	Zhu, Chaoting; Li, Jia; Yang, Ye; Zhao, Xunna; Zou, Wenwei; Tan, Ruiqin; Song, Weijie
刊名	THIN SOLID FILMS
	2017
卷号	634 页码:155-159
ISSN号	0040-6090
英文摘要	In this work, we proposed a strategy to improve the damp-heat stability and weak-acid resistance of gallium doped zinc oxide (GZO) thin films by co-doping TiO2 into GZO targets. Results showed that GZO thin films with a 0.2 wt% TiO2 co-doping in the target (GTZO) exhibited a resistivity of 5.1 x 10(-4) Omega.cm and an average transmittance of 82.9%. The relative change in sheet resistance was as low as 5.1% after 24 h damp heat treatment in conditions of 97% relative humidity at 121 degrees C. A craterlike textured surface with a high haze value was not found in GTZO thin films after dipping in 1 vol% HCl solution for 10 min. These results showed that GTZO thin films have great potential for use as transparent electrode in extreme outdoor conditions. (C) 2017 Published by Elsevier B.V.
公开日期	2017-12-25
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/13716]
专题	2017专题
推荐引用方式 GB/T 7714	Zhu, Chaoting,Li, Jia,Yang, Ye,et al. Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering[J]. THIN SOLID FILMS,2017,634:155-159.
APA	Zhu, Chaoting.,Li, Jia.,Yang, Ye.,Zhao, Xunna.,Zou, Wenwei.,...&Song, Weijie.(2017).Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering.THIN SOLID FILMS,634,155-159.
MLA	Zhu, Chaoting,et al."Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering".THIN SOLID FILMS 634(2017):155-159.