Removal functions of different polishing heads worked in planet motion model

doi:10.3788/OPE.20172510.2706

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 空间光学应用研究室

	Removal functions of different polishing heads worked in planet motion model
	Yao, Yong-Sheng 1; Ma, Zhen1 ; Xu, Liang1 ; Ding, Jiao-Teng1 ; Wang, Yong-Jie 1; Shen, Le 1; Jiang, Bo 1,2
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2017-10-01
卷号	25 期号:10 页码:2706-2713
ISSN号	1004924X
DOI	10.3788/OPE.20172510.2706
其他题名	行星运动方式下不同形状磨头的去除函数
产权排序	1
英文摘要	To obtain Gaussian-like removal function in optical manufacturing process, a convenient method to derive the removal functions of various complicated polishing heads by integrating the rotation removal function along the revolution trajectory was proposed based on the traditional planet polising theory. When the speed ratio was greater than 10,the removal function curve of a solid disk by the proposed method was very close to the result by the traditional method, which verifies the correctness of the proposed method. The proposed method was used to derive polishing removal functions of different polishing heads. By computer simulation, it shows that type II petal polishing head gets a better removal function curve when the eccentricity ratio is 0.4.Finally, the type II petal polishing head was polished, and the results indicate that when the eccentricity ratio was 0.4 and the speed ratio is 10,the test and simulation results are consistent with each other and they are all close to the Gaussian curve. These test result verifies the correctness of the proposed method again. © 2017, Science Press. All right reserved.
语种	中文
内容类型	期刊论文
源URL	[http://ir.opt.ac.cn/handle/181661/30835]
专题	西安光学精密机械研究所_空间光学应用研究室
作者单位	1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Yao, Yong-Sheng,Ma, Zhen,Xu, Liang,et al. Removal functions of different polishing heads worked in planet motion model[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(10):2706-2713.
APA	Yao, Yong-Sheng.,Ma, Zhen.,Xu, Liang.,Ding, Jiao-Teng.,Wang, Yong-Jie.,...&Jiang, Bo.(2017).Removal functions of different polishing heads worked in planet motion model.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(10),2706-2713.
MLA	Yao, Yong-Sheng,et al."Removal functions of different polishing heads worked in planet motion model".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.10(2017):2706-2713.