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题名	窄线宽外腔半导体激光器及其调谐性能研究
作者	张丽
文献子类	博士
导师	瞿荣辉
关键词	外腔半导体激光器，窄线宽，热调谐，光纤光栅热增敏 External cavity laser, narrow linewidth, thermal tuning, FBG package
其他题名	Study on Narrow Linewidth External Cavity Laser and related Tuning Performance
英文摘要	外腔半导体激光器具有窄线宽、大调谐范围、高稳定度等优点，被广泛用于通 信、传感、检测等领域。近几年空间及工程应用对外腔激光器的性能提出了更 高的要求，尤其在小型化、窄线宽及调谐三个方面。小型化的要求使得很多具 有复杂机械结构的外腔方案难以实施。同时，产业界也出现一些线宽性能优越 的小型化蝶形封装外腔激光器产品，得到较好的市场反应，但其调谐性能受限。 本论文主要研究蝶形封装下的窄线宽外腔激光器技术，以及该技术平台下的调 谐性能的拓展开发。主要内容包括： 1. 设计蝶形封装下的光纤光栅外腔半导体激光器方案，搭建实验平台，验证光 栅负反馈对线宽的压窄效应。制作工程一体化样品，得到了稳定的窄线宽输出 (13kHz)并进行多项性能测试。同时对光路耦合效率进行 ZEMAX 分析；对光纤 光栅进行了理论建模，得到光栅反射谱相位信息后代入腔纵模间隔参数的计算 及分析。最后计算了线宽、F因子，并根据实测光谱信息将我们的样品和RIO的 进行 F 因子对比分析。 2. 针对单模光纤的封装工艺展开研究。通过对胶水、衬底材料、工艺条件的系 统性研究，成功开发了小型化（不增加额外长度）、光谱维持度好（封装前后不 变，温漂过程不变）、热敏系数大的 V槽塑料衬底光纤光栅全胶灌装工艺。这对 后面的外腔热调谐方案是非常关键的。塑料衬底的 V 槽封装在热敏性方面有很 大的设计灵活性，通过衬底材料的选择和胶水固化工艺的微调，实现从 60pm/K 到 150pm/K 的任意热敏值。同时，非塑料材料（如氮化铝）等的 V 槽封装工艺 得到了开发，可用于其他对光纤散热有要求的场合。 3. 在窄线宽激光器的调谐方面，我们利用新开发的光纤光栅热增敏技术成功研 发了光纤光栅外腔激光器的热调谐技术。实现了 65pm/K的热调谐速率，是普通 光纤光栅外腔激光器的六倍。同时可以获得 35kHz 的窄线宽输出，与普通光纤 光栅外腔方案性能一致。无跳模调谐范围 0.5nm。通过缩减非热敏区域光程比， 还有望大幅提高无跳模调谐范围。提出激光器快速电调谐方案，采用飞秒激光 加工铌酸锂波导光栅，替代普通光纤光栅。联合强光实验室进行飞秒激光刻写 铌酸锂波导光栅的实验。圆圈波导的传输性能已经达到了目标的 1dB/cm，与文 献结果接近。; Compared with semiconductor laser die, external cavity laser has obvious advantages on narrow linewidth、large tuning range and high stability, and has been widely used in tel-communication, sensing, and detections. Recently, some aerospace application and other engineering areas require more on small size package, narrow linewidth and tuning capability. The small size requirement makes traditional mechanical structure based external cavity solution hard for application. At the same time, there are some commercial products comes out with small buttfly package and high linewidth performance, which wins a lot in market. This thesis mainly focus on the research of narrow linewidth external cavity laser base on small buttfly package. And also explored the tuning capability with this platform. The main content are as follows: 1. Make whole design for FBG external cavity laser base on small buttfly package. Setup lab platform and verified the negative feedback effect. We build first buttfly packaged FBG cavity laser. Stable narrow linewidth around 13kHz was achieved. A lot performance tests have been taken out. Therotically, we analysis the coupling efficiency with ZEMAX; built model for FBG and taken the information into laser cavity analysis. Linewidth and F factor were calculated and compared with RIO’s samples using tested reflection spectrum of grating. 2. Process developed for SM FBG package. Through full research on glue, substrate material, and process, we successfully developed V-groove based plastic substrate FBG package technology, with small size (without extra length), good spectrum maintaince (before and after package), and large thermal sensitivity. That’s a key technology for follow thermal tunable laser design. This package has good design agility, can get random thermal sensitivity of FBG from 60 to 150 pm/K, through the selection of plastic substrate material. Meanwhile, some none-plastic package also been developed, such as AlN, which can be used for some heat dissipation required application (high power FBG). 3. With the new developed FBG package technology, we achieved 65pm/K thermal tuning velocity in external cavity laser, which is 6 times of normal FBG design. Meanwhile, the 35kHz narrow linewdith output keeps same level with normal FBG laser. Mode-hop-free tuning of 0.5nm was observed. Once smaller the OPD ration of themal insentivity section (the gap between gain chip and grating), tuning range can be rapidly increased. Using femtosecond laser induced lithium niobate (LN) waveguide grating instead of FBG, fast electric tuning external cavity laser design was proposed. We taken co-develop with other labs for LN waveguide fabrication. And low loss of 1dB/cm has been achieved, comparable with results in recent papers.
学科主题	光学工程
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/31021]
专题	中国科学院上海光学精密机械研究所
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	张丽. 窄线宽外腔半导体激光器及其调谐性能研究[D].

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