Spatial modulation assisted scanning white-light interferometry for noise suppression

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Spatial modulation assisted scanning white-light interferometry for noise suppression
	Deng, Qinyuan 1; Liu, Junbo 2; Tang, Yan 3; Zhou, Yi 2; Yang, Yong 2; Li, Jinlong 2; Hu, Song 2
刊名	IEEE Photonics Technology Letters
	2017
关键词	Bandpass filters - Frequency domain analysis - Interferometry - Light sources - Scanning - Signal to noise ratio - Spurious signal noise - Surface measurement
ISSN号	1041-1135
英文摘要	A route of spatial modulation assisted scanning white-light interferometry with the inhibition of background noises and light source fluctuations for the topography measurement of micro/nano-structure surface was explored in this letter. The spatial modulation frequency was introduced by tilting the sample at a small angle to separate the noise signals and interference signals in the spatial frequency domain. A band-pass filter and a normalization processing were also applied with the purpose of signal-to-noise-ratio (SNR) improvement and contrast enhancement. The frequency domain analysis (FDA) was then enrolled in the eliminaiton of 2 ambiguity for the surface recovery with high-presicion. Both the theoretical analysis and the experiment results reveal the validity of spatial modulation assisted scanning white-light interferometry and its potentials in high-fidelity measurement of smooth surfaces regardless of external disturbances. IEEE
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8813]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.University of Chinese academy of Sciences, Beijing 100049, China and State Key Laboratory of Optical Technologies for Microfabrication, institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China.; 2.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics Electronics, Chinese Academy of Sciences, Chengdu, 610209, China.; 3.Institute of Optics Electronics, Chinese Academy of Sciences, Chengdu, 610209, China.
推荐引用方式 GB/T 7714	Deng, Qinyuan,Liu, Junbo,Tang, Yan,et al. Spatial modulation assisted scanning white-light interferometry for noise suppression[J]. IEEE Photonics Technology Letters,2017.
APA	Deng, Qinyuan.,Liu, Junbo.,Tang, Yan.,Zhou, Yi.,Yang, Yong.,...&Hu, Song.(2017).Spatial modulation assisted scanning white-light interferometry for noise suppression.IEEE Photonics Technology Letters.
MLA	Deng, Qinyuan,et al."Spatial modulation assisted scanning white-light interferometry for noise suppression".IEEE Photonics Technology Letters (2017).