Detection for flatness of large surface based on structured light

doi:10.1117/12.2243409

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 质量处（质检中心）

	Detection for flatness of large surface based on structured light
	He, Wenyan 1,2; Cao, Xuedong 2; Long, Kuang 2; Peng, Zhang 2
刊名	Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
	2016
卷号	9684 页码:96841W
关键词	Imaging Systems Manufacture Pixels
ISSN号	0277-786X
DOI	10.1117/12.2243409
文献子类	C
英文摘要	In order to get flatness of a large plane, this paper set up a measurement system, composed by Line Structured Light, imaging system, CCD, etc. Line Structured Light transmits parallel fringes at a proper angle onto the plane which is measured; the imaging system and CCD locate above the plane to catch the fringes. When the plane is perfect, CCD will catch straight fringes; however, the real plane is not perfect; according to the theory of projection, the fringes caught by CCD will be distorted by convex and concave. Extract the center of line fringes to obtain the distortion of the fringe, according to the functional relationship between the distortion of fringes and the height which is measured, then we will get flatness of the entire surface. Data from experiment approached the analysis of theory. In the simulation, the vertical resolution is 0.0075 mm per pixel when measuring a plane of 400mm×400mm, choosing the size of CCD 4096×4096, at the angle 85°. Helped by sub-pixel, the precision will get the level of submicron. There are two obvious advantages: method of surface sampling can increase the efficiency for auto-repairing of machines; considering the center of fringe is required mainly in this system, as a consequence, there is no serious demand for back light. © 2016 SPIE.
语种	英语
WOS记录号	WOS:000387429500068
资助机构	Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8564]
专题	光电技术研究所_质量处（质检中心）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, P.O.Box 305, Chengdu 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100049, China
推荐引用方式 GB/T 7714	He, Wenyan,Cao, Xuedong,Long, Kuang,et al. Detection for flatness of large surface based on structured light[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96841W.
APA	He, Wenyan,Cao, Xuedong,Long, Kuang,&Peng, Zhang.(2016).Detection for flatness of large surface based on structured light.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96841W.
MLA	He, Wenyan,et al."Detection for flatness of large surface based on structured light".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96841W.