Analysis of absolute flatness testing in sub-stitching interferometer

doi:10.1117/12.2243462

	Analysis of absolute flatness testing in sub-stitching interferometer
	Jia, Xin 1; Xu, Fuchao 1; Xie, Weimin 1; Xing, Tingwen 1
刊名	Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
	2016
卷号	9684 页码:968438
关键词	Atmospheric Pressure Clean Rooms Errors Humidity Control Interferometers Manufacture Measurements Optical Testing
ISSN号	0277-786X
DOI	10.1117/12.2243462
文献子类	C
英文摘要	Sub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. In the thousand level cleanroom, we establish a good environment system. Long time stability, temperature controlled at 22°±0.02°.The humidity and noise are controlled in a certain range. We establish a stitching system in the clean room. The vibration testing system is used to test the vibration. The air pressure testing system is also used. In the motion system, we control the tilt error no more than 4 second to reduce the error. The angle error can be tested by the autocollimator and double grating reading head. © 2016 SPIE.
语种	英语
WOS记录号	WOS:000387429500116
资助机构	Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8461]
专题	超精密总体部
作者单位	1.Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China
推荐引用方式 GB/T 7714	Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Analysis of absolute flatness testing in sub-stitching interferometer[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968438.
APA	Jia, Xin,Xu, Fuchao,Xie, Weimin,&Xing, Tingwen.(2016).Analysis of absolute flatness testing in sub-stitching interferometer.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968438.
MLA	Jia, Xin,et al."Analysis of absolute flatness testing in sub-stitching interferometer".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968438.