Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching

doi:10.1038/s41598-018-27593-w

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2011-2017年

	Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching
	Wu, Q ; Liu, B ; Zhu, ZC ; Gu, M ; Chen, H ; Xue, CF ; Zhao, J ; Wu, YQ ; Tai, RZ ; Ouyang, XP
刊名	SCIENTIFIC REPORTS
	2018
卷号	8 页码:-
关键词	Light-emitting-diodes Extraction Efficiency Wave-guide Nanocrystals Fluorescence Scintillator Enhancement Substrate Surface Arrays
ISSN号	2045-2322
DOI	10.1038/s41598-018-27593-w
文献子类	期刊论文
英文摘要	In this report, a novel method to prepare photonic crystals based on the combination of soft-X-ray interference lithography (XIL) and reactive ion etching (RIE) with a bi-layer photoresist system was developed. XIL can be utilized to prepare periodic structures with high efficiency but the depth of etch is limited due to the strong absorption of photoresist for soft-X-ray. Based on the pattern prepared by XIL, RIE can be utilized to further etch a second layer of photoresist, so that one can obtain a large depth of etch. Controlling the dispersion relation of the prepared photonic crystals, strongly directional emission of plastic luminescent films was demonstrated. A wavelength-integrated enhancement of 2.64-folds enhancement in the range of 420 to 440 nm in the normal direction was obtained. Guided-mode resonance and Fabry-Perot resonance could be the critical factors to control the directional emission. Devices based on directional emission films have a variety of applications in such as detectors, optical communication and display screens.
语种	英语
WOS记录号	WOS:000435447700020
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/28974]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
作者单位	1.Wu, Q 2.Liu, B 3.Zhu, ZC 4.Gu, M 5.Chen, H 6.Xue, CF 7.Zhao, J 8.Wu, YQ 9.Tai, RZ 10.Ouyang, XP
推荐引用方式 GB/T 7714	Wu, Q,Liu, B,Zhu, ZC,et al. Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching[J]. SCIENTIFIC REPORTS,2018,8:-.
APA	Wu, Q.,Liu, B.,Zhu, ZC.,Gu, M.,Chen, H.,...&Ouyang, XP.(2018).Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching.SCIENTIFIC REPORTS,8,-.
MLA	Wu, Q,et al."Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching".SCIENTIFIC REPORTS 8(2018):-.