Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor

doi:10.1088/0960-1317/24/12/125012

CORC > 重庆绿色智能技术研究院 > 中国科学院重庆绿色智能技术研究院 > 太赫兹技术研究中心

	Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor
	Wang, Lanlan 1; Jiang, Weitao 1; Liu, Hongzhong 1; Yang, Zhongbo3 ; Shi, Yongsheng 1; Yin, Lei 1; Li, Xin 2; Ding, Yucheng 1; An, Ningli 4
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2014-12-01
卷号	24 期号:12 页码:9
关键词	42.79.Bh lenses prisms and mirrors 42.82.Cr fabrication techniques lithography pattern transfer 42.25.Fx diffraction and scattering
ISSN号	0960-1317
DOI	10.1088/0960-1317/24/12/125012
通讯作者	Wang, LL (reprint author), Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 75049, Peoples R China.
英文摘要	This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f(1) = 26 +/- 1 mu m (the top lens) and f(2) = 35 +/- 1 mu m (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7% from an initial 25.8% (the corresponding aperture diameter is enlarged to 15 mu m from an initial 10 mu m) and the micro lens height ranges from 2.66 mu m to 9.03 mu m. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.
资助项目	National Natural Science Foundation of China[91323303] ; National Natural Science Foundation of China[51305337] ; National Natural Science Foundation of China[51275400] ; National Science and Technology Project[2011ZX04014071] ; National Science and Technology Project[SK201401A53-01] ; National Science and Technology Project[CERS-1-X1] ; Fundamental Research Funds for the Central Universities ; Natural Science Foundation of Shaanxi Province[2013JQ7021] ; Specialized Research Fund for the Doctoral Program of Higher Education[20130201120036] ; China Postdoctoral Science Foundation[2012M520081] ; China Postdoctoral Science Foundation[2013M530419] ; China Postdoctoral Science Foundation[2013M530424] ; China Postdoctoral Science Foundation[2013M532035]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000345824400012
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/995]
专题	太赫兹技术研究中心
通讯作者	Wang, Lanlan
作者单位	1.Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 75049, Peoples R China 2.Xi An Jiao Tong Univ, Dept Microelect, Xian 710049, Peoples R China 3.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China 4.Xian Univ Technol, Dept Packaging Engn, Xian 710048, Peoples R China
推荐引用方式 GB/T 7714	Wang, Lanlan,Jiang, Weitao,Liu, Hongzhong,et al. Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2014,24(12):9.
APA	Wang, Lanlan.,Jiang, Weitao.,Liu, Hongzhong.,Yang, Zhongbo.,Shi, Yongsheng.,...&An, Ningli.(2014).Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,24(12),9.
MLA	Wang, Lanlan,et al."Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 24.12(2014):9.