Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode

doi:10.1016/j.sse.2018.04.003

CORC > 重庆绿色智能技术研究院 > 中国科学院重庆绿色智能技术研究院 > 微纳制造与系统集成研究中心

	Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode
	Luo, Shi 1,2; Yang, Jun1 ; Song, Xuefen 1; Zhou, Xi 1,2; Yu, Leyong1 ; Sun, Tai1 ; Yu, Chongsheng 1; Huang, Deping1 ; Du, Chunlei1 ; Wei, Dapeng1,2
刊名	SOLID-STATE ELECTRONICS
	2018-07-01
卷号	145 页码:29-33
关键词	Graphene electrodes Pressure sensor Tunable sensitivity Flexibility
ISSN号	0038-1101
DOI	10.1016/j.sse.2018.04.003
英文摘要	Tunable-sensitivity and flexibility are considered as two crucial characteristics for future pressure sensors or electronic skins. By the theoretical calculation model, we simulated the relationship curve between the sensitivity and PDMS pyramids with different spacings, and found that the spacing of pyramids is a main factor to affect the sensitivity of the capacitance pressure sensor. Furthermore, we fabricated the capacitance pressure sensors using graphene electrodes and the PDMS pyramid dielectric layers with different spacings. The measurement data were consistent with the simulation results that the sensitivity increases with the spacing of pyramids. In addition, graphene electrode exhibits prefect flexibility and reliability, while the ITO electrode would be destroyed rapidly after bending. These graphene pressure sensors exhibit the potential in the application in the wearable products for monitoring breath, pulse, and other physiological signals.
资助项目	Natural Science Foundation Project of CQ CSTC[CSTC2014jcyjjq50004] ; Youth Innovation Promotion Association of ACS[2015316] ; National High-tech R&D Program of China (863 Program)[2015AA034801] ; NSFC[11404329] ; NSFC[61504148] ; NSFC[51402291] ; CAS Western Light Program ; Chongqing Research Program of Basic Research and Frontier Technology[cstc2015jcyjA50018] ; Chongqing Research Program of Basic Research and Frontier Technology[cstc2016jcyjA0166] ; Basic Scientific Research Program of Chongqing Science and Technology Commission[Cstc2016jcyjA0314]
WOS研究方向	Engineering ; Physics
语种	英语
出版者	PERGAMON-ELSEVIER SCIENCE LTD
WOS记录号	WOS:000432732000004
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/6474]
专题	微纳制造与系统集成研究中心
通讯作者	Yang, Jun; Wei, Dapeng
作者单位	1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multi Scale Mfg Technol, Chongqing 400714, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Luo, Shi,Yang, Jun,Song, Xuefen,et al. Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode[J]. SOLID-STATE ELECTRONICS,2018,145:29-33.
APA	Luo, Shi.,Yang, Jun.,Song, Xuefen.,Zhou, Xi.,Yu, Leyong.,...&Wei, Dapeng.(2018).Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode.SOLID-STATE ELECTRONICS,145,29-33.
MLA	Luo, Shi,et al."Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode".SOLID-STATE ELECTRONICS 145(2018):29-33.