Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission

doi:10.1117/1.JNP.11.036019

CORC > 重庆绿色智能技术研究院 > 中国科学院重庆绿色智能技术研究院 > 微纳制造与系统集成研究中心

	Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission
	Kong, Xiangdong 1,2; Fu, Yuegang 1,3; Zhang, Weiguo2 ; Dong, Lianhe 1; Zhou, Jianhong 1; Wang, Deqiang2
刊名	JOURNAL OF NANOPHOTONICS
	2017-07-01
卷号	11 期号:3 页码:9
关键词	transmission enhanced subwavelength structures effective medium theory dewetting
ISSN号	1934-2608
DOI	10.1117/1.JNP.11.036019
通讯作者	Fu, YG (reprint author), Changchun Univ Sci & Technol Opt & Elect Engn, Changchun, Jilin, Peoples R China. ; Zhang, WG (reprint author), Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Key Lab Multiscale Mfg Technol, Chongqing, Peoples R China.
英文摘要	The random antireflective structures are modeled by the analysis of the random morphology distribution. According to the effective medium theory, the transmission of the antireflective structure is calculated by dividing the structure into multilayer, and the dependence on parameters of the subwavelength is analyzed in detail. In the single-variable condition, etching depth, half breadth of distribution, and median of distribution get a positive correlation with the transmittance where the etching depth plays a most important part in enhancing the transmittance, whereas the angle of structures gets a negative correlation. The experimental results coincide well with the calculation and analysis. The analysis offers a theory guidance to fabricate random subwavelength antireflected structures using metal dewetting. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
资助项目	National 973 Program of China[2015CB755401] ; Natural Science Foundation of China[61504147] ; Natural Science Foundation of China[21407145] ; Natural Science Foundation of China[51503206] ; Fundamental and Research Project of Chongqing, China[cstc2013jcyjC00001] ; Chongqing Micro-nano Fabrication and Inspection Public Service Platform[cstc2014ptfwjg0003] ; "111" Project of China[D17017]
WOS研究方向	Science & Technology - Other Topics ; Optics
语种	英语
出版者	SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
WOS记录号	WOS:000413581300032
内容类型	期刊论文
源URL	[http://172.16.51.4:88/handle/2HOD01W0/194]
专题	微纳制造与系统集成研究中心精准医疗单分子诊断技术研究中心
通讯作者	Fu, Yuegang; Zhang, Weiguo
作者单位	1.Changchun Univ Sci & Technol Opt & Elect Engn, Changchun, Jilin, Peoples R China 2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Key Lab Multiscale Mfg Technol, Chongqing, Peoples R China 3.Minist Educ, Key Lab Optoelect Measurement & Opt Informat Tran, Changchun, Jilin, Peoples R China
推荐引用方式 GB/T 7714	Kong, Xiangdong,Fu, Yuegang,Zhang, Weiguo,et al. Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission[J]. JOURNAL OF NANOPHOTONICS,2017,11(3):9.
APA	Kong, Xiangdong,Fu, Yuegang,Zhang, Weiguo,Dong, Lianhe,Zhou, Jianhong,&Wang, Deqiang.(2017).Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission.JOURNAL OF NANOPHOTONICS,11(3),9.
MLA	Kong, Xiangdong,et al."Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission".JOURNAL OF NANOPHOTONICS 11.3(2017):9.