Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry
Kewei, E.1; Li, Dahai2; Zhao, Jianke1; Xue, Xun3; Li, Jing1; Li, Kun1; Liu, Shangkuo1; Wang, Zhengfeng1; Zhou, Yan1
2018
会议日期2018-05-22
会议地点Beijing, China
关键词Metrology Surface Measurement Figure Rotational Shear
卷号10835
DOI10.1117/12.2504666
英文摘要

Absolute measurement with Phase Measuring Deflectometry (PMD) is gaining importance in industry, but the accuracy of deflectometry metrology is strongly influenced by the level of calibration. In order to improve the accuracy of the PMD to a level where it competes with interferometry, a reference calibration process is commonly carried out to carefully calibrate the systematic errors. The systematic errors obtained by measuring a high quality reference surface can be subtracted from the measurement of a test surface to get its actual surface, however, it could introduce the surface error of reference into the measurement. To alleviate this problem, this paper introduces a technique named "rotational shear phase measuring deflectometry", this technique have the ability of removing the rotationally asymmetric systematic errors from the test surface without using a reference surface. The validity of this technique has been demonstrated by simulation and our experimental results. © 2018 SPIE.

产权排序1
会议录Global Intelligence Industry Conference, GIIC 2018
会议录出版者SPIE
语种英语
ISSN号0277786X;1996756X
ISBN号9781510622999
WOS记录号WOS:000452819500015
内容类型会议论文
源URL[http://ir.opt.ac.cn/handle/181661/30630]  
专题西安光学精密机械研究所_检测技术研究中心
作者单位1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China;
2.College of Electronics and Information Engineering, Sichuan University, Chengdu; 610065, China;
3.School of Science, Xi'An Jiaotong University, Xi'an; 710049, China
推荐引用方式
GB/T 7714
Kewei, E.,Li, Dahai,Zhao, Jianke,et al. Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry[C]. 见:. Beijing, China. 2018-05-22.
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