When the noise in the surface error data given by the interferometer has no effect on the iterative convergence of the RL algorithm, the RL algorithm for deconvolution in image restoration can be applied to the CCOS model to solve the dwell time. By extending the initial error function on the edge and denoising the noise in the surface error data given by the interferometer, it makes the result more available. The simulation results show the final residual error 10.7912nm nm in PV and 0.4305 nm in RMS, when the initial surface error is 107.2414 nm in PV and 15.1331 nm in RMS. The convergence rates of the PV and RMS values can reach up to 89.9% and 96.0%, respectively. The algorithms can satisfy the requirement of fabrication very well. © 2017 SPIE.