Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning
	Zhu, Meiping; Xing, Huanbin; Chai, Yingjie; Shao, Jianda; Yi, Kui; Sun, Jian; Wang, Jianguo
刊名	Opt. Eng.
	2017
卷号	56 期号:1
通讯作者	bree@siom.ac.an ; jdshao@siom.ac.cn
英文摘要	BK7 glass substrates were precleaned by different cleaning procedures before being loaded into a vacuum chamber, and then a series of plasma ion cleaning procedures were conducted at different bias voltages in the vacuum chamber, prior to the deposition of 532-nm antireflection (AR) coatings. The plasma ion cleaning process was implemented by the plasma ion bombardment from an advanced plasma source. The surface morphology of the plasma ion-cleaned substrate, as well as the laser-induced damage threshold (LIDT) of the 532-nm AR coating was investigated. The results indicated that the LIDT of 532-nm AR coating can be greatly influenced by the plasma ion cleaning energy. The plasma ion cleaning with lower energy is an attractive method to improve the LIDT of the 532-nm AR coating, due to the removal of the adsorbed contaminations on the substrate surface, as well as the removal of part of the chemical impurities hidden in the surface layer. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
收录类别	SCI
资助信息	National Science Foundation of China [61505227]; Youth Innovation Promotion Association of the Chinese Academy of Sciences
WOS记录号	WOS:000396389400006
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28107]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Zhu, Meiping,Xing, Huanbin,Chai, Yingjie,et al. Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning[J]. Opt. Eng.,2017,56(1).
APA	Zhu, Meiping.,Xing, Huanbin.,Chai, Yingjie.,Shao, Jianda.,Yi, Kui.,...&Wang, Jianguo.(2017).Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning.Opt. Eng.,56(1).
MLA	Zhu, Meiping,et al."Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning".Opt. Eng. 56.1(2017).