Image lithography in telluride suboxide thin film through controlling "virtual" bandgap

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Image lithography in telluride suboxide thin film through controlling "virtual" bandgap
	Wei, Tao; Wei, Jingsong; Zhang, Kui; Zhang, Long
刊名	Photonics Res.
	2017
卷号	5 期号:1 页码:22
通讯作者	weijingsong@siom.ac.cn ; lzhang@siom.ac.cn
英文摘要	In this work, TeO0.7 thin films were prepared by the reactive magnetron-controlling sputtering method. Complex gray-scale patterns were successfully fabricated on TeO0.7 thin films through the laser direct writing method. The structural origin of TeO0.7 thin film was investigated for gray-scale pattern formation. It is found that multiple gray-scale levels are dependent on the "virtual" bandgap energy of TeO0.7 thin films. The bandgap energy changes lead to refractive index and reflectivity difference. Thus, gray-scale tones can be formed. By accurately controlling laser energy, various "virtual" bandgaps can be generated in TeO0.7 thin films, and colorful gray-scale levels can be formed. Experimental results indicate that TeO0.7 thin film can be used as micro/nano image writing material. (C) 2016 Chinese Laser Press
收录类别	SCI
资助信息	National Natural Science Foundation of China (NSFC) [51672292, 61627826, 61137002]
WOS记录号	WOS:000394183500005
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28104]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Wei, Tao,Wei, Jingsong,Zhang, Kui,et al. Image lithography in telluride suboxide thin film through controlling "virtual" bandgap[J]. Photonics Res.,2017,5(1):22.
APA	Wei, Tao,Wei, Jingsong,Zhang, Kui,&Zhang, Long.(2017).Image lithography in telluride suboxide thin film through controlling "virtual" bandgap.Photonics Res.,5(1),22.
MLA	Wei, Tao,et al."Image lithography in telluride suboxide thin film through controlling "virtual" bandgap".Photonics Res. 5.1(2017):22.