Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学与光电技术实验室

	Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter
	Zhu, Jing; Xie, Chengke; Huang, Huijie; Chen, Ming; Yang, Baoxi
刊名	J. Opt. Technol.
	2017
卷号	84 期号:5 页码:346
通讯作者	xchke@126.com
英文摘要	In deep ultraviolet lithographic tools, precise measurement of excimer laser pulse energy is essential. However, system noise of the energy sensor, which is used to monitor the laser pulse during exposure dose control, complicate pulse energy measurement. To improve measurement precision, a specific finite impulse response filter is proposed for signal denoising. Particularly, the convolution kernel of the specific finite impulse response filter is derived from the nonlinear fitting of the energy sensor output. Experimental results show that the measurement precision of the energy sensor improves 2-3 times with the specific finite impulse response filter. To verify the effectiveness of the energy sensor, it is used for transmittance measurement; the measurement result of a Corning 7980 witness sample is consistent with that measured by a commercial ultraviolet spectrophotometer and the measurement accuracy is 0.11% (k = 2).
收录类别	SCI
WOS记录号	WOS:000408267400010
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/27515]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Zhu, Jing,Xie, Chengke,Huang, Huijie,et al. Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter[J]. J. Opt. Technol.,2017,84(5):346.
APA	Zhu, Jing,Xie, Chengke,Huang, Huijie,Chen, Ming,&Yang, Baoxi.(2017).Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter.J. Opt. Technol.,84(5),346.
MLA	Zhu, Jing,et al."Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter".J. Opt. Technol. 84.5(2017):346.