Integrated Simulation of Opto-Mechanical System

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 高密度光存储技术实验室

	Integrated Simulation of Opto-Mechanical System
	Xiao Y(肖阳); Xu WD(徐文东); Zhao CQ(赵成强)
刊名	光学学报
	2016
卷号	36 期号:7 页码:722002
通讯作者	xy1152165681@126.com ; xuwendong@mail.siom.ac.cn
中文摘要	建立了光机一体化仿真方法,从而实现对光学系统的性能评估.利用Ansys有限元软件进行热-结构仿真,将得到的数据文件进行刚体位移分离时采用新的评价函数,通过设置位移参量和随机值验证计算精度达到0.3%.运用Householder算法做Zernike拟合,将拟合系数作为与ZEMAX进行通信的数据接口,并采用动态数据交换技术实现Matlab与Zemax的数据交换.在此基础上给出一个角度检测物镜仿真的实例,得到了光学畸变随温度变化的曲线,说明为达到1的测量精度,需保证工作温度范围为14~26℃.
英文摘要	An integrated simulation method is established,and the performance assessment of optical systems is obtained,accordingly.New assessment functions are used for rigid-body displacement separation,which is conducted by deformation data from the Ansys thermal simulation.The computational accuracy of 0.3%is tested through setting displacement parameter and random value.Householder algorithm is adopted for Zernike fitting, and the Zernike coefficients are used as the interface for data exchange with Zemax,which is achieved by dynamic data exchange technology.The simulation of an objective lens is taken as an example,and a distortion-thermal curve is presented.The result indicates that in order to guarantee measuring accuracy of 1,the working temperature should be in the range from 14℃to 26℃.
收录类别	CSCD
资助信息	国家自然科学基金青年科学基金
CSCD记录号	CSCD:5764967
WOS记录号	CSCD:5764967
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28238]
专题	上海光学精密机械研究所_高密度光存储技术实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Xiao Y,Xu WD,Zhao CQ. Integrated Simulation of Opto-Mechanical System[J]. 光学学报,2016,36(7):722002.
APA	肖阳,徐文东,&赵成强.(2016).Integrated Simulation of Opto-Mechanical System.光学学报,36(7),722002.
MLA	肖阳,et al."Integrated Simulation of Opto-Mechanical System".光学学报 36.7(2016):722002.