Self-alignment of micro-parts using capillary interaction: Unified modeling and misalignment analysis

doi:10.1016/j.microrel.2013.04.009

	Self-alignment of micro-parts using capillary interaction: Unified modeling and misalignment analysis
	Gao, SQ; Zhou, YH; Zhou, YH (reprint author), Lanzhou Univ, Key Lab Mech Disaster & Environm Western China, Dept Mech & Engn Sci, Minist Educ China,Coll Civil Engn & Mech, Lanzhou 730000, Gansu, Peoples R China.
	2013-08
会议日期	APR 16-18, 2012
会议地点	Cascais, PORTUGAL
卷号	53
期号	8
DOI	10.1016/j.microrel.2013.04.009
页码	1137-1148
英文摘要	Capillary forces induced by liquid meniscus are pivotal to many important technologies, including AFM measurement, powder technology, nano-objects manipulation and capillary driven self-assembly, etc. These forces (lateral, vertical and torque) are the object of substantial theoretical and numerical modeling, especially due to its significant influence on alignment reliability of fluidic self-assembly. To further understand the capillary interaction and misalignment mechanism, we propose a generalized semi-analytical capillary force model, extending the previous single-factor models to a unified one. With an ingenious meniscus deformation mode, surface energy and the associated capillary forces and torque are given simultaneously. The well accordance between model (when degenerated into previous single-factor modes) and Surface Evolver (SE) results indicates that the complex meniscus deformation process can simply be captured by translation and rotation of the "plate series" for small perturbations. Then the intercrossing effect on misalignment is systematically evaluated, from which we obtain a complex phase diagram (also confirmed by SE simulation) to characterize system local instability. It shows that angular misalignment is always associated with the lateral one, which is also observed in the existing experiment. Moreover, the presented model is suitable for other plates (binding sites) with arbitrary shapes. (C) 2013 Elsevier Ltd. All rights reserved.
会议录	MICROELECTRONICS RELIABILITY
会议录出版地	OXFORD
学科主题	Engineering ; Science & Technology - Other Topics ; Physics
语种	英语
ISSN号	0026-2714
WOS记录号	WOS:000322292100012
内容类型	会议论文
源URL	[http://ir.lzu.edu.cn/handle/262010/184257]
专题	土木工程与力学学院_会议论文
通讯作者	Zhou, YH (reprint author), Lanzhou Univ, Key Lab Mech Disaster & Environm Western China, Dept Mech & Engn Sci, Minist Educ China,Coll Civil Engn & Mech, Lanzhou 730000, Gansu, Peoples R China.
推荐引用方式 GB/T 7714	Gao, SQ,Zhou, YH,Zhou, YH . Self-alignment of micro-parts using capillary interaction: Unified modeling and misalignment analysis[C]. 见:. Cascais, PORTUGAL. APR 16-18, 2012.