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	Design and simulation of fully-symmetrical resonant pressure sensor
	Jiang, Yiwen ; Du, Xiaohui ; Zhan, Zhan ; Xu, Bulei ; Lv, Wenlong ; Wang, Lingyun ; Sun, Daoheng ; Wang LY(王凌云) ; Sun DH(孙道恒)
	2012
关键词	Capacitance Finite element method MEMS Stress concentration Vacuum
英文摘要	Conference Name:7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. Conference Address: Kyoto, Japan. Time:March 5, 2012 - March 8, 2012.; IEEE; IEEE Nanotechnology Council; The Murata Science Foundation; The Kyoto University Foundation; Office of Naval Research Global; A fully-symmetrical resonant pressure sensor based upon lateral drive is presented, which can avoid stress concentration that arises from temperature or vacuum packaging. Unlike conventional driving method, resonant structure with laterally driven comb capacitance allows the linear characteristic of driving force and also obtains high quality factor for its slide-film air damping. Furthermore, the detection sensitivity of the device can be improved by using differential capacitance, which will reduce shared-frequency interference phenomenon at the same time. According to the FEM analysis, the structural parameters of resonant pressure sensor are optimized. Meanwhile, the pressure sensitivity of the sensor has designed to be 22.602Hz/kPa for a 18渭m thick diaphragm over a pressure range of 550kPa. From temperature simulation, the temperature coefficient of sensor is -1.8233Hz/掳C in the range of -20掳C鈭?0掳C without any temperature compensation. Finally, the frequency domain characteristics have been confirmed and the quality factors of sensor under different damping ratios are identified, it offers reliable reference for the choice of vacuum in resonant pressure sensor packaging. 漏 2012 IEEE.
语种	英语
出处	http://dx.doi.org/10.1109/NEMS.2012.6196872
出版者	IEEE Computer Society
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86236]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Jiang, Yiwen,Du, Xiaohui,Zhan, Zhan,et al. Design and simulation of fully-symmetrical resonant pressure sensor. 2012-01-01.

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