CFD simulation of the fused silica synthesis furnace | |
Feng, Tao ; Wang, Peiyong ; Wang PY(王培勇) | |
2013 | |
关键词 | Atmospheric temperature Chemical vapor deposition Fused silica Innovation Refractive index Surface properties |
英文摘要 | Conference Name:2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012. Conference Address: Kaohsiung, Taiwan. Time:November 2, 2012 - November 6, 2012.; AandF; Tailift Co., Ltd; SPINTECH; Smart Motion Control Co.,Ltd.; FXB Flexible Motion; et al; The synthesis process of the fused silica glass uses chemical vapor deposition (CVD) method in a furnace. The synthesis process involves complicated physical-chemical phenomena such as turbulence, combustion, radiation, two-phase flow, and so on. A CFD simulation has been carried out for an industrial furnace and process. The simulation result including temperature and major species concentration then is input to CHEMKIN to calculate the radical equilibrium concentration on the fused silica surface. The trend of the simulated fused silica surface temperature is consistent with the measured refraction index showing that the surface temperature is one of the most important parameters influencing the refractive index uniformity of the fused silica product. ? (2013) Trans Tech Publications, Switzerland. |
语种 | 英语 |
出处 | http://dx.doi.org/10.4028/www.scientific.net/AMM.284-287.51 |
出版者 | Trans Tech Publications |
内容类型 | 其他 |
源URL | [http://dspace.xmu.edu.cn/handle/2288/86109] |
专题 | 物理技术-会议论文 |
推荐引用方式 GB/T 7714 | Feng, Tao,Wang, Peiyong,Wang PY. CFD simulation of the fused silica synthesis furnace. 2013-01-01. |
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