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	Influence of fabrication parameters on groove profile of blazed gratings made with two-step holographic technique
	Li, SS ; Liu, S ; Zhang, XS ; Liu, Y ; Ren, XC ; Li SS(李森森)
	2005
英文摘要	Conference Name:Conference on Holography, Diffractive Optics and Applications II. Conference Address: Beijing, PEOPLES R CHINA. Time:NOV 08-11, 2004.; The two-step holographic technique of fabricating blazed gratings has been successfully applied to common positive photoresist. Influence of three fabrication parameters in the second step on groove profile of blazed gratings was studied experimentally. The three fabrication parameters are exposure, incident angle of laser beam and development time. The exposure distribution on the cross-section of one groove stripe of grating was modeled. Results of experiment and modeling with various exposures reveal that the technique is effective only when the symmetrical contour lines of exposure in the first step fade out with increasing second exposure. With other parameters fixed, experiments were also carried out with the beam incident angle varying from 10 degrees to 80 degrees and with the development time varying from 1 s to 9 s. Blazed gratings with quasi-triangular are obtained when incident angle reaches 40 degrees and when development time reaches 5 s. Scanning electron micrographs of the results are presented. Blazed gratings with observed blaze angles of 20 degrees to 50 degrees were obtained by changing the incident angle. Efficiencies of different difffraction orders for gratings with various incident angles are also given.
语种	英语
出处	http://dx.doi.org/10.1117/12.573828
出版者	P SOC PHOTO-OPT INS
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86462]
专题	信息技术－会议论文
推荐引用方式 GB/T 7714	Li, SS,Liu, S,Zhang, XS,et al. Influence of fabrication parameters on groove profile of blazed gratings made with two-step holographic technique. 2005-01-01.

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