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	Surface roughness analysis and improvement of micro-fluidic channel with excimer laser
	Chen T(陈涛) ; Zuo TC(左铁钏)
	2012-04-13 ; 2012-04-13
中文摘要	Micro-fluidic channel was fabricated on a PMMA sheet (thickness of 1.5 mm) using 248 nm excimer laser direct-writing technique. The influence of excimer laser fluence on the micromachining quality (channel's depth and surface roughness) was analyzed. Higher laser fluence results in the augmentation of channel's depth and surface roughness. The excimer laser polishing processing is favorable for the improvement of surface roughness. However, over-abundant polishing will generate tenuous stripe on the channel's edge and worsen the surface roughness. ? Springer-Verlag 2006.
原文出处	http://dlib.edu.cnki.net/kns50/download.aspx?filename=SllSu5EWVtCTD1GbhVka3ZTaxlXUjplZkt2cjZjSFl0VuFnQIh3aLd1SM5WZJFUbjlkQ45GbZ1UdhtmYtNzbIhzcrAjS0sWZZZlMz4WR6BlaHlkcRVWU5ZDRrhDMvRWVBFXeLtCVKNDNyE1aM1GSa10NktGM2AlW&tablename=CJFD2009&dflag=pdfdown 全文链接
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16922]
专题	北京工业大学
推荐引用方式 GB/T 7714	Chen T,Zuo TC. Surface roughness analysis and improvement of micro-fluidic channel with excimer laser[J],2012, 2012.
APA	陈涛,&左铁钏.(2012).Surface roughness analysis and improvement of micro-fluidic channel with excimer laser..
MLA	陈涛,et al."Surface roughness analysis and improvement of micro-fluidic channel with excimer laser".(2012).

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