High refractive index TiO2 film deposited by electron beam evaporation

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	High refractive index TiO2 film deposited by electron beam evaporation
	Yao JK(姚建可) ; Huang H. L. ; Ma J. Y. ; Jin Y. X. ; Zhao Y. A. ; Shao J. D. ; He H. B. ; Yi K. ; Fan Z. X. ; Zhang F. ; Wu Z. Y.
刊名	surf. eng.
	2009
卷号	25 期号:3 页码:257
关键词	Crystal seed Rutile TiO2 film High refractive index Electron beam evaporation
ISSN号	0267-0844
中文摘要	the well known 'crystal seed' theory is first applied in this work to prepare tio2 film: a high refractive index rutile tio2 film is grown by electron beam evaporation on the rutile seed formed by 1100 degrees c annealing. the average n is larger than 2.4, by far the highest in all the authors' tio2 films. the films are characterised by optical properties, microstructure and surface morphologies. it is found that the refractive index shows positive relation with the crystal structure, grain size, and packing density and roughness of the film. the film has lower density of granularity and nodule defects on the surface than those of the film deposited by magnetron sputtering. the result shows attractive application in complex filter and laser coatings.
学科主题	光学薄膜
语种	英语
WOS记录号	WOS:000264352500014
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4784]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Yao JK,Huang H. L.,Ma J. Y.,et al. High refractive index TiO2 film deposited by electron beam evaporation[J]. surf. eng.,2009,25(3):257, 260.
APA	姚建可.,Huang H. L..,Ma J. Y..,Jin Y. X..,Zhao Y. A..,...&Wu Z. Y..(2009).High refractive index TiO2 film deposited by electron beam evaporation.surf. eng.,25(3),257.
MLA	姚建可,et al."High refractive index TiO2 film deposited by electron beam evaporation".surf. eng. 25.3(2009):257.