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静电悬浮加速度计反馈引起闭环点漂移机理及抑制方法
刘爽 ; 刘云峰 ; 董景新 ; LIU Shuang ; LIU Yun-feng ; DONG Jing-xin
2016-03-30 ; 2016-03-30
关键词非线性 闭环点漂移 C0G电容 静电悬浮加速度计 high performance liquid chromatography Bisphenol A environmental water samples determination TH824.4
其他题名Mechanism and suppression method for feedback-caused close-loop position fluctuation of electrostatically suspended accelerometer
中文摘要静电悬浮加速度计的检测质量闭环点位置偏离电极框中心时会造成系统非线性误差,调整检测电路输出电压可调整检测质量闭环点,而在调整过程中发现反馈电压变化会引起电容检测电路输出电压漂移,从而影响闭环点调节精度。为解决此问题,研究了闭环点位置与检测电路输出电压变化的关系,推导了检测电路传递函数,初步确定了反馈电压对检测电路输出电压影响的原因是隔直电容选取不恰当,通过实验对比了材料为C0G、Y5P、X7R及SL的多层陶瓷电容作为隔直电容时输出电压与反馈电压关系。实验结果表明:采用低温漂、耐高压和受频率影响小的C0G电容作为隔直电容能够消除反馈对检测电路引起的输出电压漂移,从而消除调节闭环点过程中闭环点位置的漂移,并且能提高检测电路稳定性。; The nonlinearity of electrostatically suspended accelerometer(ESA) is related to the closed-loop position of proof mass(Pm), which can be adjusted by changing the output of detection circuit(Udc). It is found that Udc can be changed by feedback voltage(Vb) during the adjustment, thus causing the fluctuation of Pm. In order to solve this problem, the relationship between Pm and Udc is studied, and the transform function of detection circuit is deduced. The contrast test is carried out with C0 G, Y5 P, X7 R and SL capacitances under different Vb and frequencies. Theoretical and experimental results show that the reason for the fluctuation of Udc caused by Vb is the variation of the isolation capacitance caused by Vb. Using the C0 G capacitance, which is immune to temperature and high voltage and frequency, not only could overcome the fluctuation of Pm during adjustment, but also improve the stability of the detector circuit.
语种中文 ; 中文
内容类型期刊论文
源URL[http://ir.lib.tsinghua.edu.cn/ir/item.do?handle=123456789/144622]  
专题清华大学
推荐引用方式
GB/T 7714
刘爽,刘云峰,董景新,等. 静电悬浮加速度计反馈引起闭环点漂移机理及抑制方法[J],2016, 2016.
APA 刘爽,刘云峰,董景新,LIU Shuang,LIU Yun-feng,&DONG Jing-xin.(2016).静电悬浮加速度计反馈引起闭环点漂移机理及抑制方法..
MLA 刘爽,et al."静电悬浮加速度计反馈引起闭环点漂移机理及抑制方法".(2016).
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